Electrical and optical properties of Al-doped ZnO thin films by sol–gel process

Atmospheric Spatial Atomic Layer Deposition of In-Doped ZnO

“…The O 1s region shows a characteristic peak at 530.3 eV while In 3d 5/2 and Zn 2p 3/2 peaks are centered at 444.6 and 1021.70 eV, respectively, indicating that the film consists of ZnO and In 2 O 3 . 24,25 XRD spectra of the films are shown in Fig. 4.…”

Effect of Al-doped on physical properties of ZnO Thin films grown by spray pyrolysis on SnO2: F/glass

“…Other advantage of the spray pyrolysis method is that it can be adapted easily for production of large-area films. In fact, to enhance its electrical and optical properties, ZnO is commonly doped with one of the following elements: Indium [20], Fluorine [9], Aluminum [11][12][13][16][17][18][19], Gallium [14], Cobalt [15] and Tin [21]. In particular, the main reason of being chosen of aluminum as the dopant of ZnO is to enhance the electrical conductivity.…”

“…Recently, ZnO thin films have been used as a window layer and contact layer for thin film solar cells with Cu(In,Ga)S 2 or Cu(In,Ga)Se 2 absorber material. ZnO films have been prepared by various methods of film depositions, which include radio frequency magnetron sputtering [9][10][11], sol-gel processing [12][13][14][15][16], spray pyrolysis [17,22], etc. Among these methods, the spray pyrolysis method is one of the most commonly used methods for preparation of transparent and conducting oxides owing to its simplicity, safety, non-vacuum system of deposition.…”

“…It is well known that the physical properties of thin films depend on the substrate properties. Up to now, ZnO thin films were prepared on silicon, Al 2 O 3 , kapton, ZnO:Al, glass and sapphire substrates [9][10][11][12][13][14][15][16][17][18][19][20][21][22]. In this paper, we present the effect of aluminum dopant concentration ratio in the spray solution (y=( [Al 3+ ]/[Zn 2+ ]) solution = 0, 1%, 2% and 3%) on the structural, electrical and optical properties of ZnO thin layers deposited by chemical spray on nanostructured substrates such as fluorine doped tin oxide (FTO).…”

Formation of Al-doped ZnO thin films on glass by sol–gel process and characterization

“…The conductivity of ZnO transparent film could be enhanced by optimizing doping level and processing parameters. In this way, ZnO thin films would be an attractive alternative to replace ITO for some promising applications such as solar cells, transducers, gas sensors and heating mirrors (Kim and Tai 2007;Wu 2010).…”