2011
DOI: 10.1016/j.tsf.2011.06.073
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Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition

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Cited by 15 publications
(12 citation statements)
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“…Obtained results are in good agreement with technological predictions and measurements carried out on other Hall measurement tools [8]. The developed system proved the potential of reliable resistivity, mobility and doping concentration measurements on various semiconductors.…”
Section: Resultssupporting
confidence: 81%
See 1 more Smart Citation
“…Obtained results are in good agreement with technological predictions and measurements carried out on other Hall measurement tools [8]. The developed system proved the potential of reliable resistivity, mobility and doping concentration measurements on various semiconductors.…”
Section: Resultssupporting
confidence: 81%
“…1. [8] is usually achieved in case of state of the art ZnO layers for TCO applications in solar cells.…”
Section: Resultsmentioning
confidence: 99%
“…In most of these preparations, MS has been the technique of choice for the simple reason that it is better suited for depositions over large areas. Some examples in the literature include the MS-OAD of Ga-doped ZnO [168,347,348] and the development of a co-sputtering method for the fabrication of high and low refractive index layers of TNO and AZO, respectively, for use in the preparation of a transparent and conductive distributed Bragg reflector [340,349]. In this structure, the eight-period stack of AZO/TNO layers produces a reflectivity of $90% along a spectral region centered at 550 nm, and a resistivity of less than 2 Â 10 À3 X cm.…”
Section: Alternative Tco Films Prepared Under Oad Conditionsmentioning
confidence: 99%
“…Table 1 showed that SA-1 presented a higher crystallite size than SA-0, meaning that the substrate rotation resulted in an improving of the crystallinity for the deposited CdTe samples. Furthermore the improving in crystallinity by increasing the grain size and reducing the strain has proven to better the transmittance of ZnO nanostructures in previous works [30]. Layer porosity is the main factor that we [23][24][25][26][27][28] considered to explain the optical properties for of the CdTe samples grown using substrate rotation at different GLAD angles.…”
Section: Results and Discusionmentioning
confidence: 99%