A high-nitrogen-concentration diamond sample was subjected to 200-keV electron irradiation using a transmission electron microscope. The optical and spin-resonance properties of the nitrogen-vacancy (NV) color centers were investigated as a function of the irradiation dose up to 6.4 Â 10 21 e À /cm 2 . The microwave transition frequency of the NV À center was found to shift by up to 0.6% (17.1 MHz) and the linewidth broadened with increasing electron-irradiation dose. Unexpectedly, the measured magnetic sensitivity is best at the lowest irradiation dose, even though the NV concentration increases monotonically with increasing dose. This is in large part due to a sharp reduction in optically detected spin contrast at higher doses. The nitrogen-vacancy (NV) center in diamond has been explored recently for many applications including quantum information, 1 magnetic sensors, 2-5 and subwavelength imaging. 6 Much of the NV utility is due to its optically detectable ground-state electron spin resonance. To achieve the best performance of magnetic-sensing devices utilizing ensembles of NV À centers, a high concentration of the centers is desired.7 This is achieved by either implanting nitrogen into pure diamond or by creating vacancies in nitrogen-rich diamond, followed by annealing to produce NV centers. Substitutional nitrogen atoms (N S ) that do not form NV centers are a source of spin dephasing, so it is important to optimize the conversion of N S to NV. One way to achieve this is with high-dose electron irradiation followed by annealing. 8 In this paper, the effects of irradiation damage on the magneticsensing properties of the NV centers are explored.Vacancies can be created using a variety of irradiating species, including electrons, neutrons, protons, and ions. Koike et al. reported on the displacement threshold energy, T d , of type-IIa natural diamond using a transmission electron microscope (TEM) for three principal crystallographic directions, [100], [110], and [111].9 It was found that T d was 37-48 eV and the minimum incident-electron energy needs to be 180, 210, and 220 keV, respectively, for the [100], [111], and [110] orientations in order to form displacement-related defects. Steeds and co-workers demonstrated the creation of self-interstitials and carbon-carbon pairs along [100], using a 300 keV TEM. 10,11 Campbell and Mainwood predicted the radiation damage of diamond caused by both electron and gamma irradiation.12 Recent work has focused on proton and electron irradiation on diamond, studying the converted NV À and NV 0 concentrations for optical-magnetometer applications 8 as well as NV À formation using low-energy electrons.
13In this work, we used TEM irradiation of [100]-oriented nitrogen-rich type-Ib single-crystal bulk diamond. After irradiation, the vacancies are made mobile by annealing at approximately 700 C. The vacancies bind with a neutral substitutional nitrogen center, N 0 S , to form an NV À center as follows:The latter reaction assumes that a second nitrogen center serves as an ...