2012
DOI: 10.1088/1367-2630/14/4/043024
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Effects of low-energy electron irradiation on formation of nitrogen–vacancy centers in single-crystal diamond

Abstract: Exposure to beams of low-energy electrons (2-30 keV) in a scanning electron microscope locally induces formation of NV-centers without thermal annealing in diamonds that have been implanted with nitrogen ions. We find that non-thermal, electron-beam-induced NV-formation is about four times less efficient than thermal annealing. But NV-center formation in a consecutive thermal annealing step (800 • C) following exposure to low-energy electrons increases by a factor of up to 1.8 compared to thermal annealing alo… Show more

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Cited by 53 publications
(51 citation statements)
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“…NV centers are produced in large area single crystal diamond as well as in nano-diamonds by ion implantation technique [24]. However, during ion implantation, it is easier to induce structural modifications (graphitization) in diamond nanoparticles compared to the large area single crystal diamond thin film [25].…”
Section: The Formation Of Nv Centersmentioning
confidence: 99%
See 1 more Smart Citation
“…NV centers are produced in large area single crystal diamond as well as in nano-diamonds by ion implantation technique [24]. However, during ion implantation, it is easier to induce structural modifications (graphitization) in diamond nanoparticles compared to the large area single crystal diamond thin film [25].…”
Section: The Formation Of Nv Centersmentioning
confidence: 99%
“…In practice, this phenomenon is quite different, because the defects created by implantation enhance the diffusion process. Usually, the annealing treatment is done by keeping the ion implanted samples in a vacuum furnace at a temperature between 800 • C and 1000 • C. Schwartz et al studied the effect of low-energy electrons on formation of NV centers in low-energy nitrogen ion implantation on single-crystal diamonds [24]. The implanted single crystal diamond was exposed to the low-energy source, which led to the formation of NV centers without any thermal annealing.…”
Section: Implant Damage and Damage Annealingmentioning
confidence: 99%
“…As a result, in most cases it would be beneficial to increase the concentration of NV centers while keeping the nitrogen concentration constant, i.e. improve the N to NV conversion efficiency.A common technique for improving the conversion efficiency is the irradiation of the sample with electrons [16][17][18], protons [19], or ions [20], which creates vacancies in the lattice. Additional annealing mobilizes the vacancies, thus increasing their probability of occupying lattice sites adjacent to isolated nitrogens and forming stable NV centers.…”
mentioning
confidence: 99%
“…12 Recent work has focused on proton and electron irradiation on diamond, studying the converted NV À and NV 0 concentrations for optical-magnetometer applications 8 as well as NV À formation using low-energy electrons. 13 In this work, we used TEM irradiation of [100]-oriented nitrogen-rich type-Ib single-crystal bulk diamond. After irradiation, the vacancies are made mobile by annealing at approximately 700 C. The vacancies bind with a neutral substitutional nitrogen center, N 0 S , to form an NV À center as follows:…”
mentioning
confidence: 99%