Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition

Wang, Aiji; Chen, Tingfang; Lu, Shouxiang; Wu, Zhenglong; Li, Yongliang; Chen, He; Wang, Yinshu

doi:10.1186/s11671-015-0801-y

Cited by 63 publications

(33 citation statements)

References 31 publications

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“…However, ZnO film fabricated by solution processing, such as sol–gel and hydrothermal methods, contains a large amount of organic substances in the film that result in degradation of electrical conductivity . Thus, postannealing processes at high temperature are used to improve the electrical conductivity after deposition of the film . However, this causes changes to the crystallographic property, and the process is difficult to apply in flexible electronic devices that use plastic substrates .…”

Section: Introductionmentioning

confidence: 97%

Influence of Surface Morphology and Conductivity on Photocatalytic Performance of Solution‐Processed Zinc Oxide Film

Hong

Matsushita

Shirai

et al. 2017

Chemistry An Asian Journal

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Solution-processed ZnO films with various structures have been fabricated and the influence of surface morphology and conductivity on photocatalytic performance, including improvement of conductivity, hydrogen production, and photodegradation of rhodamine B, has been investigated. Surface morphology was controlled by solution conditions, and as-fabricated films had rod, dense, and flower-like structures. Improved conductivity was revealed by the photocatalytic activity of ZnO, the influence of surface morphology on the photodegradation of rhodamine B, and the relationship with conductivity and hydrogen production.

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Section: Introductionmentioning

confidence: 97%

Influence of Surface Morphology and Conductivity on Photocatalytic Performance of Solution‐Processed Zinc Oxide Film

Hong

Matsushita

Shirai

et al. 2017

Chemistry An Asian Journal

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“…So far, indium tin oxide (ITO) was a typical commercial TCO. ITO film was very popular choice for TCO materials, because of its low resistivity, good electrical and optical properties [3][4][5]. However, ITO film has some drawbacks including high cost, low stability in hydrogen plasma and toxicity [5].…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the supply of the rare and expensive indium in ITO is rapidly being limited [4]. However, the scarce and toxic nature of indium and instability of ITO have stimulated researchers to explore alternative TCO materials for ITO [3]. In recent years, zinc oxide (ZnO) films have become an ideal alternative TCO material due to its cost-saving and wide availability [4].…”

Section: Introductionmentioning

confidence: 99%

Effect of annealing temperature on structural morphological and optical properties of spray pyrolized Al-doped ZnO thin films

et al. 2019

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Aluminium doped zinc oxide (AZO) thin films were prepared on glass substrate by spray pyrolysis technique and subsequently their structural, morphological and optical properties were investigated and analyzed as a function of annealing temperature. The films were deposited at 350°C and were annealed at temperature 350, 400, 450 and 500°C. X-ray diffraction (XRD) analysis confirms that both deposited and annealed films are polycrystalline in nature and have hexagonal wurtzite structure. The crystalline size as well as the crystalline quality of the film was found to increase with the increase of annealing temperature to a certain point. However, the dislocation density and the compressive stress induced in as-deposited AZO films reduce with annealing temperature. SEM image reveals that the deposited film has nanorope like morphology. The average diameter of the rope and the density of the morphology increases with the increase of annealing temperature. As the annealing temperature increases from 350°C to 450°C, the average transmittance of the films increases and the band gap value decreases from 3.25 eV to 3.17 eV. In addition, obtained results also show that urbach energy, extinction coefficient, refractive index, optical conductivity has changes noticeably with annealing temperature.

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“…Various properties of ALD-based AZO films have been reported by many research groups [ 19 – 22 ]. Among these properties, optical properties are generally studied and analyzed based on transmission and photoluminescence spectra [ 21 , 22 ]. However, there are few reports on the properties evaluated by spectroscopic ellipsometry (SE) analysis [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

et al. 2016

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The tuning of structural, optical, and electrical properties of Al-doped ZnO films deposited by atomic layer deposition technique is reported in this work. With the increasing Al doping level, the evolution from (002) to (100) diffraction peaks indicates the change in growth mode of ZnO films. Spectroscopic ellipsometry has been applied to study the thickness, optical constants, and band gap of AZO films. Due to the increasing carrier concentration after Al doping, a blue shift of band gap and absorption edge can be observed, which can be interpreted by Burstein-Moss effect. The carrier concentration and resistivity are found to vary significantly among different doping concentration, and the optimum value is also discussed. The modulations and improvements of properties are important for Al-doped ZnO films to apply as transparent conductor in various applications.Electronic supplementary materialThe online version of this article (doi:10.1186/s11671-016-1625-0) contains supplementary material, which is available to authorized users.

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Effects of doping and annealing on properties of ZnO films grown by atomic layer deposition

Cited by 63 publications

References 31 publications

Influence of Surface Morphology and Conductivity on Photocatalytic Performance of Solution‐Processed Zinc Oxide Film

Influence of Surface Morphology and Conductivity on Photocatalytic Performance of Solution‐Processed Zinc Oxide Film

Effect of annealing temperature on structural morphological and optical properties of spray pyrolized Al-doped ZnO thin films

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

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