Effects of Casimir force on pull-in instability in micromembranes

Abstract

PACS 03.65.Sq-Semiclassical theories and applications PACS 07.10.Cm-Micromechanical devices and systems PACS 85.85.+j-Micro-and nano-electromechanical systems (MEMS/NEMS) and devices Abstract-We analyze pull-in instability of electrostatically actuated microelectromechanical systems, and study changes in pull-in parameters due to the Casimir effect. When the size of the device is reduced, the magnitude of the Casimir force is comparable with that of the Coulomb force and it significantly alters pull-in parameters. We model the deformable conductor as an elastic membrane and consider different geometries. Beyond a certain critical size the pull-in instability occurs with zero applied voltage, and the device may collapse during the fabrication process.

Gap Dependent Bifurcation Behavior of a Nano-Beam Subjected to a Nonlinear Electrostatic Pressure

“…They have considered both vdW and Casimir forces in all gap distances between two parallel plates. But, as said before, many researchers such as Batra et al (2007), Palasantzas et al . (2008), Boström et al (2012) and Lambrecht and Reynaud (2000) have clarified that at smaller distances dominant force is the vdW force whereas for larger distances the Casimir force is dominant and there is a regime in which the transition from vdW to Casimir force Latin American Journal of Solids and Structures 11 (2014) 2426-2443 takes place.…”

“…vdW force and Casimir force can both be connected with the existence of zero-point vacuum oscillations of the electromagnetic field (Batra et al, 2007;Bordag et al, 2001;Klimchitskaya, 2000;Lifshitz, 1956;Moeenfard et al, 2012).…”

Pull-In Instabilities in Functionally Graded Microthermoelectromechanical Systems

“…In micro-mirrors [2] and micro-resonators [12] the designer avoids this instability to achieve stable motions, while in switching applications [1] the designer exploits this effect to optimize device's performance. Much of the literature on MEMS is summarized in [13], and the pull-in instability in MEM plates and membranes has been studied by several researchers; e.g., see [14][15][16] and references cited therein.…”

Pull-in control in microswitches using acoustic Casimir forces

“…Having another force besides the electrostatic attraction has been considered in the study of pull-in dynamics, for example dispersive forces [16,17,18].…”