2006
DOI: 10.1088/0957-4484/17/18/036
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Effect of the growth rate on the morphology and structural properties of hut-shaped Ge islands in Si(001)

Abstract: The effect of Ge deposition rate on the morphology and structural properties of self-assembled Ge/Si(001) islands was studied. Ge/Si(001) layers were grown by solid-source molecular-beam epitaxy at 500 °C. We adjusted the Ge coverage, 6 monolayers (ML), and varied the Ge growth rate by a factor of 100, R = 0.02-2 ML s(-1), to produce films consisting of hut-shaped Ge islands. The samples were characterized by scanning tunnelling microscopy, Raman spectroscopy, and Rutherford backscattering measurements. The me… Show more

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Cited by 27 publications
(10 citation statements)
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“…39 The average Ge content of 80%-90% ͑depending on t Si ͒ in the nanoclusters was determined from Raman measurements. The transition from two-dimensional to three-dimensional island growth was observed after ϳ4 monolayers ͑ 1 ML= 1.41 Å͒ of Ge deposition both for the first and second Ge layers.…”
Section: Methodsmentioning
confidence: 99%
“…39 The average Ge content of 80%-90% ͑depending on t Si ͒ in the nanoclusters was determined from Raman measurements. The transition from two-dimensional to three-dimensional island growth was observed after ϳ4 monolayers ͑ 1 ML= 1.41 Å͒ of Ge deposition both for the first and second Ge layers.…”
Section: Methodsmentioning
confidence: 99%
“…For our experimental conditions the parameter B = 2 [2,3]. The presence of Ge-Si bonds on QD interface can be taken into account by the way described in [3,4].…”
Section: Resultsmentioning
confidence: 99%
“…The presence of Ge-Si bonds on QD interface can be taken into account by the way described in [3,4]. If the quantity of deposited Ge in monolayers m is exactly known, one can apply the approach used in work [3]. Then:…”
Section: Resultsmentioning
confidence: 99%
“…Another feature at ∼420 cm −1 corresponds to the local Ge-Si vibrations. Based on Raman measurements the Ge-Si intermixing effect can be found from the ratio of the integrated intensities of the Ge-Ge and Ge-Si peaks 57 I Ge-Ge…”
Section: Effect Of Growth Rate On Germanium Hut Clustersmentioning
confidence: 99%