Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings

Čapek, Jiří; Hřeben, S.; Zeman, Petr; Vlček, Jaroslav; Čerstvý, R.; Houška, Jiří

doi:10.1016/j.surfcoat.2008.07.025

Cited by 41 publications

(12 citation statements)

References 18 publications

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“…In 2005, Vlcek et al prepared an amorphous Si-B-C-N film on silicon substrate by a reactive magnetron sputtering technique [21]. The as-deposited film has a smooth surface, high hardness, high structural stability, nice oxidation resistance, controllable electrical resistance and even photoluminescence property [22][23][24]. In 2007, Yang et al developed the mechanical alloying plus sintering method to prepare Si-B-C-N bulk ceramic [25].…”

Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

et al. 2012

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Abstract:In the past twenty years, Si-B-C-N ceramic has attracted wide attention due to its special structure and outstanding properties. The ceramic generally has an amorphous or a nano-crystalline structure, and has excellent structural stability, oxidation resistance, creep resistance and high-temperature mechanical properties, etc. Thus, Si-B-C-N ceramic attracts many researchers and finds potential applications in transportation, aerocraft, energy, information, microelectronics and environment, etc. Much work has been carried out on its raw materials, preparation processes, structural evolution, phase equilibrium and high-temperature properties. In recent years, many researchers focus on its new preparation methods, the preparation of dense ceramic sample with large dimensions, ceramic matrix composites reinforced by carbon fiber or SiC whisker, or components with various applications. Research on Si-B-C-N ceramic will develop our insight into the relationship between structures and properties of ceramics, and will be helpful to the development of novel high-performance ceramics. This paper reviews the preparation processes, general microstructures, mechanical, chemical, electrical and optical properties, and potential applications of Si-B-C-N ceramic, as well as its matrix composites.

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Section: Introduction To Si-b-c-n Ceramicmentioning

confidence: 99%

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

et al. 2012

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“…RFMEFI57614X0001) in part of fabrication of ceramic PVD targets by hot pressing, and supported by the Russian Scientific Foundation (agreement no. 15 19 00203) in part of the investigation of combustion process. …”

Section: Acknowledgmentsmentioning

confidence: 99%

“…Diffraction silent amorphous Si-B-C-(N) coat ings can be obtained by reactive magnetron sputtering of Si, B, and graphite targets in an N 2 -Ar atmosphere [9,[14][15][16]. A promissory challenge to elemental tar gets is the use of three component Si-B-C ones.…”

Section: Introductionmentioning

confidence: 99%

Silicon carbide ceramics SHS-produced from mechanoactivated Si–C–B mixtures

Potanin

Zvyagintseva

Pogozhev

et al. 2015

Int. J Self-Propag. High-Temp. Synth.

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We investigated the influence of mechanical activation (MA) and initial temperature T 0 on combustion temperature T c and burning velocity U c for 90% (Si + C) -10% (4B + C) mixtures as well as on product morphology. Mechanical activation was found to strongly change the size and morphology of Si and graphite particles (by a factor of 6-8), lead to accumulation of micro strains, and increase the reactivity of green mixture. An increase in T 0 was found to proportionally increase the values of T c and U c but produce little or no influence on the phase composition of product. The SiC powder consisting of 50-100 nm crystal lites was obtained by diminution of combustion product and then used to prepare, by hot pressing, a ceramic PVD target for magnetron sputtering.

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“…Varying the gas mix partial pressure demonstrated that the oxidation resistance of SiBCN coatings could be controlled. With a Si target content maintained at 75% coatings were deposited by reactive magnetron sputtering in an Ar and N 2 atmosphere, the effect of changing the partial pressure of Ar from 50% to 75% was studied [58].…”

Section: Oxidation Resistance and Thermal Stabilitymentioning

confidence: 99%

“…XRD analysis showed that at 50% Ar a protective SiO 2 layer formed on the surface which accounts for the mass gain after 1600 ˚C but remains amorphous underneath. Comparatively, the coating at 75% Ar gave reflection from Si crystallisation; crystals provide oxygen diffusion pathways at their boundaries, explaining the reduction in the oxidation resistance [58].…”

Section: Oxidation Resistance and Thermal Stabilitymentioning

confidence: 99%

Development of high temperature/oxidation- resistant PVD coatings for cutting tools using HIPIMS

Morton¹

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Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings

Cited by 41 publications

References 18 publications

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

Progress of a novel non-oxide Si-B-C-N ceramic and its matrix composites

Silicon carbide ceramics SHS-produced from mechanoactivated Si–C–B mixtures

Development of high temperature/oxidation- resistant PVD coatings for cutting tools using HIPIMS

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