Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD

Kazmanli, M. K.; Ürgen, Mustafa; Çakır, Ali

doi:10.1016/s0257-8972(02)00866-6

Cited by 94 publications

(53 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…[1][2][3][4]. It is well known that coatings of TiN [3][4][5][6] and MoN [1,2] provide wear protection (being deposited on cutting tools for hard to machine parts); in some cases, they protect against corrosion. However, the thermal stability of these coatings (sin gle layer coatings of TiN and MoN) is not very high.…”

mentioning

confidence: 99%

The effect of nanolayer thickness on the structure and properties of multilayer TiN/MoN coatings

et al. 2014

View full text Add to dashboard Cite

Abstract-The effect of nanolayer thickness on the structure and properties of nanocomposite multilayer TiN/MoN coatings is revealed. The multilayer (alternating) TiN/MoN coatings are prepared by the Arc PVD method. The selected thickness of the nanolayers is 2, 10, 20, and 40 nm. The formation of two phases-TiN (fcc) and γ Mo 2 N-is found. The ratio of Ti and Mo concentrations varies with varying layer thickness. The maximum hardness value obtained for different thicknesses of the layers does not exceed 28-31 GPa. The stability of TiN/MoN during cutting and tribological tests is significantly higher than that of products with TiN coatings. The nanostructured multilayer coatings with layer thicknesses of 10 and 20 nm exhibit the lowest friction coefficient of 0.09-0.12.

show abstract

mentioning

confidence: 99%

The effect of nanolayer thickness on the structure and properties of multilayer TiN/MoN coatings

et al. 2014

View full text Add to dashboard Cite

show abstract

“…Comparative analysis shows that the coatings are erased, but not peeled during scratching. That is cohesive failure associated with plastic deformation [23][24][25], and formation of fatigue cracks in the coating's material takes place. The cohesive strength of multi-component coating (Zr-Ti-Cr-Nb)N was determined from the measurements (L C = 62.06 N).…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Research of Superhard (Zr-Ti-Cr-Nb)N Coatings

et al. 2015

View full text Add to dashboard Cite

This work presents the results of (Zr-Ti-Cr-Nb)N superhard coatings research. The samples were fabricated by the vacuum-arc deposition method (Arc-PVD). Structure, composition and properties of these coatings were studied. The study of coatings was carried out using scanning electron microscopy, energy dispersive spectroscopy, and X-ray diffraction. Hardness measurements and adhesion tests were performed. The coatings thickness was up to 6.2 µm, nanocrystallites sizes ranged from 4 to 7.3 nm. Values of hardness and cohesive strength were H = 43.7 GPa and LC = 62.06 N, respectively. The optimal conditions for coating deposition were found.

show abstract

“…CrN 경질 코팅막은 상대적으로 낮은 경도를 가지지만, 약 800 o C까지의 우수한 내산화 특성을 가지고 있어 고 온 환경 산업과 고속 가공용 기계부품으로 적용되 어 왔다 3,4) . Mo-N 경질 코팅막은 높은 경도, 몰리 브덴의 좋은 용해성 때문에 스틸 기판과의 좋은 밀 착성, 낮은 마찰계수를 나타내는 것으로 알려져 있 다 [5][6][7][8] . 이러한 천이금속 질화물의 기계적 특성을 높 이기 위해 천이금속보다 작은 Al, Si 등의 원소를 첨가함으로 박막내에 치환 고용으로 인한 높은 경 도와 내마모성, 고온 안정성과 내산화성을 나타내 는 다성분계 Me-X-N(X = Al, Si, Cu, Ag 등) 박막 에 대한 연구가 지속적으로 진행되고 알려지고 있 다 [9][10][11][12][13][14][15][16] .…”

Section: 서 론unclassified

Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films

Shin¹,

Choi²,

Wang³

et al. 2010

Journal of the Korean institute of surface engineering

View full text Add to dashboard Cite

Ternary Mo-Cu-N films were deposited on Si wafer substrates with various copper contents by magnetron sputtering method using Mo target and Cu target in Ar/N 2 gaseous atmosphere. As increasing N 2 pressure, the microstructure of Mo-N films changed from γ-Mo 2 N of (111) having face-centered-cubic (FCC) structure to δ-MoN of (200) having hexagonal structure. Detailed the microstructures of the Mo-Cu-N coatings were studied by X-ray diffraction, scanning electron microscopy and field emission transmission electron microscope. The results indicated that the incorporation of copper into the growing Mo-N coating led to the Mo . 그 중에서도 Si를 첨가하므로 40 GPa 이상 의 초고경도를 나타내는 nc-TiN/a-Si3N4와 같은 결 정질과 비정질로 이루어진 나노복합체 미세구조에 대한 연구가 활발히 진행되었다 [17][18][19] . 그러나, Cu, Ag와 같은 soft metal(SM)을 첨가한 다성분계 Me-SM-N에 대한 연구는 이제 시작단계라고 할 수 있 다 11-16). 그 중에서, Mo-Cu-N 박막의 경우 MoO 3 -CuO의 이성분계 산화물에 의해 매우 낮은 마찰계

show abstract

Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD

Cited by 94 publications

References 20 publications

The effect of nanolayer thickness on the structure and properties of multilayer TiN/MoN coatings

The effect of nanolayer thickness on the structure and properties of multilayer TiN/MoN coatings

Fabrication and Research of Superhard (Zr-Ti-Cr-Nb)N Coatings

Effect of Copper Content on the Microstructural Properties of Mo-Cu-N Films

Contact Info

Product

Resources

About