2021
DOI: 10.1021/acs.nanolett.0c03625
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Dynamic Hybrid Metasurfaces

Abstract: Efficient hybrid plasmonic-photonic metasurfaces that simultaneously take advantage of the potential of both pure metallic and all-dielectric nanoantennas are identified as an emerging technology in flat optics. Nevertheless, postfabrication tunable hybrid metasurfaces are still elusive. Here, we present a reconfigurable hybrid metasurface platform by incorporating the phase-change material Ge2Sb2Te5 (GST) into metal-dielectric meta-atoms for active and nonvolatile tuning of properties of light. We systematica… Show more

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Cited by 104 publications
(42 citation statements)
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“…In addition, although the phase transition of metasurface was demonstrated by using thermal control, reconfigurable electrical/optical tunning is also possible for the proposed approach and platform for reversible phase change of GST metasurface. [ 36,53–57 ] Recent studies have achieved controllable phase change metasurface through Joule heating where a 15–50 nm Al 2 O 3 capping layer was deposited to protect the devices. [ 53,54 ] A thin layer of dielectric (e.g., SiO 2 or Al 2 O 3 ) or indium tin oxide could be uniformly coated on the nanopillars by atomic layer deposition for optically or electrically controlled multilevel GST crystallization and reversible phase transition, respectively.…”
Section: Discussionmentioning
confidence: 99%
“…In addition, although the phase transition of metasurface was demonstrated by using thermal control, reconfigurable electrical/optical tunning is also possible for the proposed approach and platform for reversible phase change of GST metasurface. [ 36,53–57 ] Recent studies have achieved controllable phase change metasurface through Joule heating where a 15–50 nm Al 2 O 3 capping layer was deposited to protect the devices. [ 53,54 ] A thin layer of dielectric (e.g., SiO 2 or Al 2 O 3 ) or indium tin oxide could be uniformly coated on the nanopillars by atomic layer deposition for optically or electrically controlled multilevel GST crystallization and reversible phase transition, respectively.…”
Section: Discussionmentioning
confidence: 99%
“…Besides utilizing optical metasurface architectures, thermally tunable active phase change materials (PCMs), such as germanium antimony telluride (GeSbTe or GST) chalcogenide [19][20][21], perovskite manganese oxide [22], samarium nickel oxide (SmNiO 3 ) [23], and most importantly vanadium dioxide (VO 2 ) [24], can be used as an ideal scheme to control the thermally tuned optical response. The usage of PCMs with diverse optical properties brings up a unique solution in different technologies [25].…”
Section: Introductionmentioning
confidence: 99%
“…Amongst existing PCMs, archetypal compound germanium antimony telluride (Ge 2 Sb 2 Te 5 or GST for short) has been vastly exploited in commercial rewritable optical disk storage technology and phase-change electronic memory applications exhibits attractive intrinsic features including non-volatility (long retention time of at least 10 years), ultrafast switching speed (10s-100s of ns), high switching robustness (potentially up to 10 12 cycles), considerable scalability (down to nanometer-scale lengths), low energy transition (down to a few aJ/nm 3 ), compatibility with CMOS processes, and good thermal stabil-ity, among others [24][25][26][27][28][29][30]. Given the unique optical and electrical properties of GST, recently, significant attention has been paid toward the implementation of reconfigurable metadevices based on these properties [31][32][33][34][35][36][37].…”
Section: Introductionmentioning
confidence: 99%