Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

Peng, Peng; Zhou, Wu; Li, Lun; He, Junpeng; Peng, Bei; Yu, Huijun; He, Xiaoping

doi:10.1109/jsen.2022.3222006

Cited by 3 publications

(2 citation statements)

References 47 publications

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“…However, the effect of temperature on MEMS accelerometers is still an important research topic. In some highprecision fields such as aerospace, accuracy and reliability are particularly needed [9], and temperature drift is a major shortcoming [10]. Although the temperature sensitivity of capacitive accelerometers is very low, temperature drift will still seriously affect their performance, especially in high temperature environment [11].…”

Section: Introductionmentioning

confidence: 99%

Improvement and compensation of temperature drift of scale factor of a SOI-based MEMS differential capacitive accelerometer

Zhai

et al. 2023

Meas. Sci. Technol.

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In recent years, the analysis and improvement of temperature characteristics of Si-based capacitive accelerometers has received considerable research attention in the field of MEMS sensors. Generally, the influence of temperature on the accelerometers can be mitigated by optimizing the structural design and compensating the output signal. Herein, the output characteristics of an accelerometer designed with asymmetrically arranged combs were analyzed under various temperatures. The purpose of this paper is to improve the TDSF of MEMS capacitive accelerometer, using the asymmetric layout structure to improve the TDSF fundamentally, and the least square method to achieve temperature compensation efficiently. The variations in the temperature drift of the scale factor (TDSF) were compared for the symmetric and asymmetric structures. In addition, we modeled the accelerometer with an asymmetric structure for simulations to analyze the errors resulting from the electrostatic torsion phenomenon induced by the asymmetric structure. Moreover, a temperature compensation model was developed for the scale factor of the accelerometer, which was validated and verified with the data obtained from simulations and experiment. Furthermore, an accelerometer based on silicon on insulator was fabricated and tested to verify the simulation results and the compensation effects. According to the results, the scale factor of the studied accelerometer was 171.83 mV/g and the average value of the TDSF was 83.56 ppm/°C. Overall, the experimental results were almost consistent with the simulation results. Under the asymmetric layout, the scale-factor stability improvement of the accelerometer could reach up to 86.96%, and the error caused by electrostatic torsion was ~2.93%, which is relatively negligible. After compensation, the range and standard deviation of the scale factor of the accelerometer with respect to temperature were reduced by 94.46% and 95.69%, respectively, and the average value of TDSF was reduced by 95.90%, which verified the effectiveness of the compensation model.

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Section: Introductionmentioning

confidence: 99%

Improvement and compensation of temperature drift of scale factor of a SOI-based MEMS differential capacitive accelerometer

Zhai

et al. 2023

Meas. Sci. Technol.

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“…Simultaneously, when the system works at a higher frequency, the resonant capacitor will be offset due to the high temperature. Specifically, the value of the resonant capacitor changes due to temperature change, and the negative drift is more noticeable than the positive drift [7]. For example, the negative drift of Y5V materials can reach up to −80% drift.…”

Section: Introductionmentioning

confidence: 99%

Pulse Width Modulation-Controlled Switching Impedance for Wireless Power Transfer

Ma,

Chai,

et al. 2023

Energies

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The exceptional performance of the wireless power transfer (WPT) system hinges on its resonant state. However, the capacitance drift caused by manufacturing tolerance and temperature will result in a state of detuning. In this manuscript, a PWM-controlled switched impedance (PCSI) topology that can express inductive and capacitive is proposed to eliminate line mismatches resulting from the above factors. Firstly, the PCSI topology is introduced, and its placement is determined based on the characteristics of the inductor–capacitor–capacitor series (LCC-S) network. Secondly, the working principle of the proposed topology is introduced. Finally, the simulation and experimental results show that the system could be restored to its resonant state by adjusting the PCSI topology. Under different values of resonant capacitors, the PCSI topology enhances the output power of the system by 40 W~150 W compared to the previous state, and the efficiency is increased by 9~13%.

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Impact of Thermal Variations and Soldering Process on Performance and Behavior of MEMS Capacitive Accelerometers

Martínez Lahoz,

Asiain Ansorena,

Beltrán Blázquez

2023

IEEE Sensors J.

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Drift of MEMS Capacitive Accelerometers for One-Year Room-Temperature Storage: A Simulation and Experimental Study

Cited by 3 publications

References 47 publications

Improvement and compensation of temperature drift of scale factor of a SOI-based MEMS differential capacitive accelerometer

Improvement and compensation of temperature drift of scale factor of a SOI-based MEMS differential capacitive accelerometer

Pulse Width Modulation-Controlled Switching Impedance for Wireless Power Transfer

Impact of Thermal Variations and Soldering Process on Performance and Behavior of MEMS Capacitive Accelerometers

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