2019
DOI: 10.1109/ted.2019.2896674
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Drain-Engineered TFET With Fully Suppressed Ambipolarity for High-Frequency Application

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Cited by 82 publications
(19 citation statements)
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“…The process starts with a 10 nm thick, lightly doped silicon wafer with doping N C ≈ 1×10 17 atoms/cm 3 , as shown in Fig 2(a). Then, using atomic layer deposition (ALD) technique, a 2 nm thick Hf O 2 layer is deposited on the silicon surface, as shown in Fig 2(b) [31]- [33]. This is followed by the deposition of a 3 nm thick metal layer (M 1 ) with a work-function φ 1 , using the e-beam deposition technique, as shown in Fig.…”
Section: A Device Fabricationmentioning
confidence: 99%
“…The process starts with a 10 nm thick, lightly doped silicon wafer with doping N C ≈ 1×10 17 atoms/cm 3 , as shown in Fig 2(a). Then, using atomic layer deposition (ALD) technique, a 2 nm thick Hf O 2 layer is deposited on the silicon surface, as shown in Fig 2(b) [31]- [33]. This is followed by the deposition of a 3 nm thick metal layer (M 1 ) with a work-function φ 1 , using the e-beam deposition technique, as shown in Fig.…”
Section: A Device Fabricationmentioning
confidence: 99%
“…A tunnelling field‐effect transistor (TFET) has become a kind of promising candidate for the ultra‐low power consumption applications in the nanoscale circuit because of overcoming a limitation of 60 mV/Dec subthreshold swing (SS) [1–8]. However, band‐to‐band tunnelling (BTBT) is the main working mechanism in TFETS [9–16], which leads to an inherent disadvantage in terms of ON‐state current [17–28].…”
Section: Introductionmentioning
confidence: 99%
“…The ambipolar current may become further increase with down scaling of device dimension and with the use of low bandgap materials. Various approaches have been proposed for reducing the ambipolarity 23‐30 . However, they result in ON current degradation, increased complexity poor frequency response.…”
Section: Introductionmentioning
confidence: 99%
“…The use of dual material gate 27 has increased the total gate capacitance and hence degraded the overall performance. The use of Gaussian drain doping, 26,29 multiple work function, 31,32 and multiple equivalent oxide thickness (EOT)'s 28 for drain and separate EOT for gate for doping‐less architecture also exhibits the structural complexity, and it is prone to the process variation. The gate‐drain underlap and overlap approaches have been very popular and fabrication friendly.…”
Section: Introductionmentioning
confidence: 99%