Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas

Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristic

“…In the bulk of the discharge plasma, the electron frequency ( p ), the capacitance of the parallel electrode (C 0 ) can be used to express the inductance due to the inertia of the electron in the bulk of the plasma [11,20], ) where, m is the mass of the electron, d is the distance between the electrodes, A is the surface area of the parallel plate, n e is the electron density. The plasma bulk is assumed to be quasineutral and (for simplicity) homogeneous.…”

“…There are several diagnostic techniques employed for the determination of electron density and temperature in dc plasmas which includes Langmuir probe [5,6], plasma spectroscopy [7,] microwave and laser interferometries, and Thomson scattering [8][9][10]. Several characterization techniques are reported in recent literature to characterize the atmospheric pressure capacitively couple radio frequency (CCRF) plasma for different experimental parameters [11][12][13][14]. The electrical discharge characteristic can be also used to estimate the plasma parameters, which is simpler, easier, quicker and no additional equipment is required [11].…”

“…Several characterization techniques are reported in recent literature to characterize the atmospheric pressure capacitively couple radio frequency (CCRF) plasma for different experimental parameters [11][12][13][14]. The electrical discharge characteristic can be also used to estimate the plasma parameters, which is simpler, easier, quicker and no additional equipment is required [11]. Li et al [11] estimated the electron density and electron temperature from the current-voltage and current-power characteristic of an atmospheric pressure CCRF plasma by using homogeneous discharge model.…”

“…The electrical discharge characteristic can be also used to estimate the plasma parameters, which is simpler, easier, quicker and no additional equipment is required [11]. Li et al [11] estimated the electron density and electron temperature from the current-voltage and current-power characteristic of an atmospheric pressure CCRF plasma by using homogeneous discharge model. They have estimated the plasma density in mode of atmospheric pressure CCRF plasma.…”

“…They have estimated the plasma density in mode of atmospheric pressure CCRF plasma. They assumed that the electron density n e is only proportional to the rms value of the applied current because of the frequent electron neutral collision in atmospheric pressure, which makes the drift velocity of the electron independent on the variation of applied electric field [11]. This model can be used to evaluate the plasma parameters in atmospheric pressure CCRF plasma.…”