Direct patterning of TiO2 and TiN based sol-gel using laser interference and nanospheres UV lithography

Jourlin, Yves; Crespo‐Monteiro, Nicolas; Valour, Arnaud

doi:10.1117/12.2596229

Cited by 3 publications

(4 citation statements)

References 17 publications

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“…The thin film resulting from the nitration of a TiO2 sol-gel using RTN treatment, as seen in Figure 1, confirms the formation of a TiN layer through the presence of Raman bands characteristic of the TiN crystalline phase. This is consistent with previous studies [25][26][27][28][29][30][31][32][33][34][35][36][37] . The Raman spectrum of the TiO2 (Figure 1 in black) shows multiple peaks but no features of crystallized TiO2.…”

Section: Structural Propertiessupporting

confidence: 94%

“…This can be attributed to residual porosity from the preparation method. However, as previously stated in our research [25][26][27][28][29][30][31][32][33][34][35][36][37] , these results indicate that the TiN layer, obtained through a simplified and cost-effective method, can still be potentially used as a plasmonic layer in the NIR range, despite some losses.…”

Section: Optical Propertiessupporting

confidence: 86%

“…It involves TiO2 sol-gel film that can be first photo-patterned and converted into TiN using thermal nitridation in an ammonia atmosphere [22][23][24][25][26] . The main benefit of using a sol-gel based process is the ability to produce submicron structures with various reproducible shapes, such as gratings 22,27, or pillars [28][29][30][31] , on large surface areas 28 without shape restrictions 32,33 . Traditional nitridation processes for TiO2 films are typically done in ovens at high temperatures for processing time (more than 800°C for several hours) 34,35 , which limits their use for stable substrates at high temperatures and their industrial applicability.…”

Section: Introductionmentioning

confidence: 99%

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Micro-nanostructuring by optical lithography and nitridation of photo-patternable TiO2 sol-gel to obtain micro-nanostructured TiN

Otero

Crespo‐Monteiro

Gamet

et al. 2023

Advances in Patterning Materials and Processes XL

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Titanium nitride (TiN) combines plasmonic properties in the visible and near infrared spectral region with good mechanical properties, high thermal and chemical stability making it a very promising alternative to noble metals for optical applications at high temperature or in extreme environments. The authors present a new easy and fast process for the elaboration of micro-nanostructured TiN layers. This process combines photo-patternable TiO2 sol-gel by optical lithography and a nitridation process, by rapid thermal annealing (RTA). During this presentation, the elaboration of sol-gel, its structuring by different optical lithography methods, as well as its nitridation by RTA are presented.

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Section: Structural Propertiessupporting

confidence: 94%

Section: Optical Propertiessupporting

confidence: 86%

Section: Introductionmentioning

confidence: 99%

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Micro-nanostructuring by optical lithography and nitridation of photo-patternable TiO2 sol-gel to obtain micro-nanostructured TiN

Otero

Crespo‐Monteiro

Gamet

et al. 2023

Advances in Patterning Materials and Processes XL

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“…Another option for producing ZrO2 thin films is the sol-gel method [26][27][28][29][30][31] . The sol-gel method allows the micro-nanostructuring of thin films through techniques such as optical 29,[31][32][33][34] and nanoimprint lithography [35][36][37] . Optical lithography has the advantage of being able to micro-nanostructure a wide range of substrates of different shapes 29,30,38 and sizes 39,40 without the need for etching processes.…”

Section: Introductionmentioning

confidence: 99%

Micro-nanostructuring of ZrO2 sol-gel by optical and nanoimprint lithography on various substrate for optical applications

Otero

Crespo‐Monteiro

Gamet

et al. 2023

Novel Patterning Technologies 2023

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Zirconium oxide (ZrO2) is an intensively studied and used material due to its many remarkable physical and chemical properties. The high performances of ZrO2 allows its use in many applications such as coatings against corrosion, wear and oxidation, optical applications, anti-counterfeiting, or in medical applications such as dental or prosthesis. There are many methods to synthesize ZrO2 among which we can mention reactive sputtering, chemical vapor deposition, atomic layer deposition. These techniques are well known in thin film deposition processes. However, they do not allow to easily structure the coatings to produce complex patterns (shapes, micro-nanostructures) on variable substrates in shape and size. Another process of elaboration of ZrO2 thin films is the sol-gel method. This technique makes possible the micro-nanostructuring of the films by optical and nanoimprint-based lithography. In this paper, the authors will describe how the ZrO2 sol-gel can be used to obtain both complex patterns (shapes, micro-nanostructures) by optical lithography (mask lithography, colloidal lithography) and by nanoimprint lithography. The authors will also show the possibility to use this versatile sol-gel and the associated structuring methods to structure complex patterns on variable substrates in their nature and geometry, as well as the possibility of using this process in optical applications. Preliminary results will be presented through several microstructured ZrO2 demonstrators obtained from the microstructuring process on sol-gel layers. The produced layers have been characterized by Raman spectroscopy, scanning electron microscopy, atomic force microscopy. The optical properties (transmittance, reflectance) have also been investigated and a study of the influence of a thermal treatment on the refractive index and thickness of the layer has been carried out.

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A comprehensive review on the synthesis and photothermal cancer therapy of titanium nitride nanostructures

Ifijen

Maliki

2022

Inorganic and Nano-Metal Chemistry

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Direct patterning of TiO2 and TiN based sol-gel using laser interference and nanospheres UV lithography

Cited by 3 publications

References 17 publications

Micro-nanostructuring by optical lithography and nitridation of photo-patternable TiO2 sol-gel to obtain micro-nanostructured TiN

Micro-nanostructuring by optical lithography and nitridation of photo-patternable TiO2 sol-gel to obtain micro-nanostructured TiN

Micro-nanostructuring of ZrO2 sol-gel by optical and nanoimprint lithography on various substrate for optical applications

A comprehensive review on the synthesis and photothermal cancer therapy of titanium nitride nanostructures

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