MRS Proc. 2000 DOI: 10.1557/proc-624-157 View full text
David M. Longo, Robert Hull

Abstract: ABSTRACTWe describe how focused ion beam (FIB) direct write technology may be combined with microcontact printing (μCP) and other pattern transfer techniques to enable nanoscale fabrication of complex patterns over both curved and planar surfaces. Nanoscale printheads are fabricated by direct sputtering or deposition (Pt or SiO2) in the FIB. These printheads are capable of transferring 100 nm features over fields of view up to 1 mm2, onto planar and curved surfaces. We are also investigating the concept of “pr…

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