Digital image correlation of SEM images for surface deformation of CMOS IC

Chen, Terry Yuan Fang; Chen, Tzu Ching; Cheng, Fa Yen; Tsai, Ang Ting; Lin, Ming-Tzer

doi:10.1016/j.mee.2018.09.007

Cited by 8 publications

(8 citation statements)

References 11 publications

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“…In this study, β, ϕ, and ∅ were assumed 0 • , 45 • , and 90 • . The strain ε y , γ xy , and ε y are taken by DIC analysis [15,28,29]. The stress can be calculated for a thin film by Equations ( 4) and ( 5):…”

Section: Methods Of Residual Stress Measurementmentioning

confidence: 99%

Mechanical Properties and Residual Stress Measurement of TiN/Ti Duplex Coating Using HiPIMS TiN on Cold Spray Ti

et al. 2022

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This study investigated the mechanical properties and the residual stress of high-power impulse magnetron sputtering (HiPIMS) titanium nitride (TiN) thin film capping on cold spray titanium (Ti) coating. This TiN/Ti duplex coating was deposited on the Ti substrate, and the cold spray titanium (Ti) coating was prepared in three cases with different numbers of layers. The study determined Young’s modulus, hardness, and roughness of TiN thin film and cold spray Ti coatings by nano-indentation and AFM. The residual stress measurement of TiN/Ti duplex coating was conducted using the ring-core drilling method. A focused ion beam (FIB) drilled the TiN/Ti duplex coating with various milling depth steps. The corresponding images were obtained with a scanning electron microscope (SEM). The relationship between surface deformations and relaxation stress after each milling depth step was obtained using the digital image correlation (DIC) method. The results showed TiN/Ti duplex coating exhibited excellent mechanical properties, and the residual stresses were not significantly changing with different Ti cold spray substrates, showing the feasibility of coating technology for the future applications in the aerospace industry.

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Section: Methods Of Residual Stress Measurementmentioning

confidence: 99%

Mechanical Properties and Residual Stress Measurement of TiN/Ti Duplex Coating Using HiPIMS TiN on Cold Spray Ti

et al. 2022

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“…where u (x, y) is the horizontal displacement of the object deformation, and v (x, y) is the vertical displacement of the object deformation. Previously, the measurement stability, accuracy, and speed of calculation using different image correlation criteria of DIC on SEM images were investigated [18]. The accuracy and stability of ZNSSD and the Sum of Squared Differences (SSD) of DIC were compared.…”

Section: Methodsmentioning

confidence: 99%

“…Based on the principle of fundamental mechanics, the stress components perpendicular to the Z direction of the surface, such as xz, yz, and zz are all zero; therefore, the stress on the surface at the time of drilling is in equilibrium, which must be redistributed and released. Previously, the measurement stability, accuracy, and speed of calculation using different image correlation criteria of DIC on SEM images were investigated [18]. The accuracy and stability of ZNSSD and the Sum of Squared Differences (SSD) of DIC were compared.…”

Section: Methodsmentioning

confidence: 99%

“…Prior to this, a study was performed on the validation methodology of DIC for SEM to reduce errors and use it for strain and surface deformation measurement of Complementary Metal-Oxide-Semiconductor Integrated Circuit (CMOS IC) samples. This DIC method and its parameters on SEM images were validated for testing under spatial translation or time [18]. In the study, the stability, accuracy, and speed of calculation were compared by utilizing various image correlation criteria; the accuracy and stability of Zero-Normalized Sum of Squared Differences (ZNSSD) and Sum of Squared Differences (SSD) of DIC were studied.…”

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confidence: 99%

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Using Digital Image Correlation on SEM Images of Strain Field after Ion Beam Milling for the Residual Stress Measurement of Thin Films

et al. 2020

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The residual stress of thin films during the deposition process can cause the components to have unpredictable deformation and damage, which could affect the service life and reliability of the microsystems. Developing an accurate and reliable method for measuring the residual stress of thin films at the micrometer and nanometer scale is a great challenge. To analyze the residual stress regarding factors such as the mechanical anisotropy and preferred orientation of the materials, information related to the in-depth lattice strain function is required when calculating the depth profiles of the residual strain. For depth-resolved measurements of residual stress, it is strategically advantageous to develop a measurement procedure that is microstructurally independent. Here, by performing an incremental focused ion beam (FIB) ring-core drilling experiment with various depth steps, the digital image correlation (DIC) of the specimen images was obtained. The feasibility of DIC to FIB images was evaluated after the translation test, and an appropriate procedure for reliable results was established. Furthermore, the condition of the film in the function of residual stress was assessed and compared to elucidate the applicability of this technology.

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“…Since biological muscle tissue is a viscoelastic material, it is not easy to measure the stress of muscle tissue. In the past, many studies have used optical technology to measure the characteristics of biological muscle tissue [17][18][19][20][21], using optical measurement to measure abnormal stress of muscle tissue, and diagnosed some diseases. In the past, the anisotropic parameters, e.g., linear birefringence (LB), circular birefringence (CB), circular dichroism (CD), linear dichroism (LD), and depolarization (Dep), were used to measure the stress of chicken breast tissue [21] based upon the linear birefringence decoupled from the Mueller matrix of a tested sample.…”

Section: Introductionmentioning

confidence: 99%

Use of Digital Image Correlation Method to Measure Bio-Tissue Deformation

et al. 2021

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Traditionally, strain gauge, extensometer, and reflection tracking markers have been used to measure the deformation of materials under loading. However, the anisotropy and inhomogeneity of most biological materials restricted the accessibility of the real strain field. Compared to the video extensometer, digital image correlation has the advantage of providing full-field displacement as well as strain information. In this study, a digital image correlation method (DIC) measurement system was employed for chicken breast bio-tissue deformation measurement. To increase the contrast for better correlation, a mixture of ground black pepper and white sesame was sprayed on the surface of samples. The first step was to correct the distorted image caused by the lens using the inverse distorted calibration method and then the influence of subset size and correlation criteria, sum of squared differences (SSD), and zero-normalized sum of squared differences (ZNSSD) were investigated experimentally for accurate measurement. Test results of the sample was translated along the horizontal direction from 0 mm to 3 mm, with an increment of 0.1 mm and the measurement result was compared, and the displacement set on the translation stage. The result shows that the error is less than 3%, and accurate measurement can be achieved with proper surface preparation, subset size, correlation criterion, and image correction. Detailed examination of the strain values show that the strain εx is proportional to the displacement of crosshead, but the strain εy indicates the viscoelastic behavior of tested bio-tissue. In addition, the tested bio-tissue’s linear birefringence extracted by a Mueller matrix polarimetry is for comparison and is in good agreement. As noted above, the integration of the optical parameter measurement system and the digital image correlation method is proposed in this paper to analyze the relationship between the strain changes and optical parameters of biological tissue, and thus the relative optic-stress coefficient can be significantly characterized if Young's modulus of biological tissue is known.

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Digital image correlation of SEM images for surface deformation of CMOS IC

Cited by 8 publications

References 11 publications

Mechanical Properties and Residual Stress Measurement of TiN/Ti Duplex Coating Using HiPIMS TiN on Cold Spray Ti

Mechanical Properties and Residual Stress Measurement of TiN/Ti Duplex Coating Using HiPIMS TiN on Cold Spray Ti

Using Digital Image Correlation on SEM Images of Strain Field after Ion Beam Milling for the Residual Stress Measurement of Thin Films

Use of Digital Image Correlation Method to Measure Bio-Tissue Deformation

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