Diffusion of Hydrosilanes from the Control Layer to the Vinylsilane-Rich Flow Membrane during the Fabrication of Microfluidic Chips

Guo, Dongjie; Xiao, Shou‐Jun; Liu, Hongbo; Chao, Jie; Xia, Bing; Wang, Jing; Pei, Jia; Pan, Yi; Gu, Zhongze; You, Xiao‐Zeng

doi:10.1021/la0514866

Cited by 23 publications

(15 citation statements)

References 28 publications

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“…These results demonstrate that an organic DMS monolayer is successfully assembled on the PSi surface (Surface d) which has a similar IR spectrum to the PDMS precursor except for a small Si–H vibration at 2160 cm −1 . 38 Additionally, each double methyl group on Sample d is assembled at the end of a Si–O–Si group, similar to the structural distribution of PDMS, where methyl groups are exposed on the most outside surface to reduce the surface energy. 39 Therefore, the surface energy of Sample d matches that of the PDMS precursor.…”

Section: Resultsmentioning

confidence: 99%

Fabrication and adhesion of a bio-inspired microarray: capillarity-induced casting using porous silicon mold

Guo

Zhang

et al. 2013

J. Mater. Chem. B

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Inspired by the setal microstructure found on the gecko’s toe-pads, a highly dense array of high-aspect-ratio (HAR) artificial setae has been developed with a novel mold-casting technique using a porous silicon (PSi) template. To overcome the high fluid resistance in the HAR capillary pores, the PSi template surface is modified with a monolayer coating of dimethylsilane. The coating exhibits similar chemical composition and surface energy to the precursor of the poly(dimethylsiloxane) (PDMS) replica. The compatibility between the template and the replica addresses the major challenge of molding HAR microstructures, resulting in high-resolution replicas of artificial PDMS microsetae with complicated geometry resembling a real gecko’s setae. The artificial setae are characterized by a mean radius of 1.3 μm, an aspect ratio of 35.1, and a density of ~4.7 × 105 per mm2. Results from adhesion characterizations reveal that with increasing preload, the shear adhesion of micro-setae continually increases while the normal adhesion decreases. The unique adhesion performance is caused by both van der Waals forces and the elastic resistance of PDMS setae. With further structural optimizations and the addition of an actuation mechanism, artificial setal arrays might eventually demonstrate the fascinating adhesion performances of the gecko for mimetic devices such as wall-climbing devices.

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Section: Resultsmentioning

confidence: 99%

Fabrication and adhesion of a bio-inspired microarray: capillarity-induced casting using porous silicon mold

Guo

Zhang

et al. 2013

J. Mater. Chem. B

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“…The mold-pattered PU membrane was then cut to match the Cu-based negative template. The PDMS precursor (8:1 polymer:crosslinker) [35] was poured onto the Cu-based template along one side, and left for 2 h to ensure complete wetting by the colloidal PDMS. The mold-patterned PU membrane was coated to prevent the PDMS colloid diffusing.…”

Section: Fabricating the Primary Setaementioning

confidence: 99%

“…Conversely, when the ratio is less than 1:10, for example 8 : 1, the silicone hydride group is in excess and residues remain after curing. Due to a high rate of diffusivity, silicone molecules can easily enter the PDMS membrane by thermal diffusion [35]. Thus the diffused silicone molecules can take the hydrosilylation reaction and the associated active functions inside PDMS membrane, thus improving the mechanical properties of the PDMS elastomer [35].…”

Section: Characterizations Of the Hierarchical Setaementioning

confidence: 99%

“…Due to a high rate of diffusivity, silicone molecules can easily enter the PDMS membrane by thermal diffusion [35]. Thus the diffused silicone molecules can take the hydrosilylation reaction and the associated active functions inside PDMS membrane, thus improving the mechanical properties of the PDMS elastomer [35]. Therefore, the vinyl rich PDMS colloid from the 20 : 1 formulation can take part in hydrosilylation with the Si-H rich PDMS precursor from the 8 : 1 formulation, bonding the primary and the secondary setae.…”

Section: Characterizations Of the Hierarchical Setaementioning

confidence: 99%

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Fabrication and adhesion of hierarchical micro-seta

et al. 2012

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Spark-erosion perforating technology was used to fabricate a Cu-based template characterized by pores with radius of 0.5 mm inclined at 75°. A commercial silicone elastomer of poly(dimethylsiloxane) (PDMS) with a rich Si-H content was used to produce an inclined array of primary setae. The technique of argon ion plasma etching on crystalline silicon was used to fabricate negative templates with radii of 5, 10, and 20 μm. The Si-H rich PDMS was used to cast three types of fine array templates, which acted as the secondary setae. A vinyl-rich PDMS precursor was used to bind the primary and secondary setae by a hydrosilylation reaction, thus allowing the formation of three different hierarchical arrangements of setae. Adhesion tests demonstrated that shear adhesion was anisotropic, first increasing in strength then decreasing to a stable level as slippage occurred. The adhesion strength was significantly influenced by the nature of the secondary setae, showing a strong correlation with aspect-ratio and concentration. seta, poly(dimethylsiloxane), adhesion, hierarchical structure Citation:Zhang H, Wu L W, Jia S X, et al. Fabrication and adhesion of hierarchical micro-seta.

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“…ATR-FTIR is a powerful sampling tool for polymer characterizations [26] . Detailed information was used to reveal molecular structure and element composition 1 μm below the surface.…”

Section: Atr-ftir Measurementsmentioning

confidence: 99%

Hybrids perfluorosulfonic acid ionomer and silicon oxide membrane for application in ion-exchange polymer-metal composite actuators

Guo

Ding

Wei

et al. 2009

Sci. China Ser. E-Technol. Sci.

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Citation: Guo D J, Ding H T, Wei H J, et al. Hybrids perfluorosulfonic acid ionomer and silicon oxide membrane for application in ion-exchange polymer-metal composite actuators.This paper reports a new technique to fabricate an ion-exchange polymer-metal composite (IPMC) actuator. This technique is based on a hybrid organic-inorganic composite membrane. In the fabrication course, silica oxide particles, prepared from hydrolysis of tetraethyl orthosilicate in situ with sol-gel reaction, co-crystallize with perfluorosulfonate acid (PFSA) ionomer. Attenuated total reflectance fourier transform infrared spectroscopy (ATR-FTIR) analyses demonstrate that a highly water-saving hybrid membrane is formed. Measurements of mechanical properties reveal that elastic modulus and hardness of the hybrid membrane are about 2 times compared to a commercial PFSA membrane. Scanning electron microscopy (SEM) results show that the hybrid membrane has a high porosity. Inside the membrane pores, there exists a great quantity of micro scale channels in the range of 100-300 nm. After fabrication of IPMC actuator, an electric current sensor, a force sensor, and a high speed camera are assembled and used to evaluate IPMC performance. It is shown that, compared to an IPMC actuator made from a commercial membrane, the electromechanical performance of the new actuator increases 6-8 times; when it is actuated in air, its stable non-water working time is prolonged for 6-7 times.

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Diffusion of Hydrosilanes from the Control Layer to the Vinylsilane-Rich Flow Membrane during the Fabrication of Microfluidic Chips

Cited by 23 publications

References 28 publications

Fabrication and adhesion of a bio-inspired microarray: capillarity-induced casting using porous silicon mold

Fabrication and adhesion of a bio-inspired microarray: capillarity-induced casting using porous silicon mold

Fabrication and adhesion of hierarchical micro-seta

Hybrids perfluorosulfonic acid ionomer and silicon oxide membrane for application in ion-exchange polymer-metal composite actuators

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