In this study, the AZO nanorods were used as pH sensor materials based on extended-gate fieldeffect transistor (EGFET) and the pH sensitivity and AZO nanostructure characteristics were investigated and discussed in the different pH buffer solutions. The aluminum-doped zinc oxide nanorods were grown by hydrothermal method. The pre-treatment procedures were included the 0.0075 M zinc acetate solution was spin-coated on Si substrates for different number of times. Secondary, the substrate was submerged horizontally in zinc nitrate hexahydrate (Zn(NO 3 2 · 6H 2 O), diethylenetriamine (DETA), and doped the solution of aluminium nitrate, nonahydrate (Al(NO 3 3 · 9H 2 O) at about 120 C for 4 h. The AZO nanorods sensing structure based on the EGFET was finished. Accordingly, the size and surface morphology of the AZO nanorods were examined by a field emission scanning electron microscope (FE-SEM), and the current-voltage characteristics curves and pH sensitivities were measured by the semiconductor parameter analyzer. The experimental results found that the morphology of AZO is that of a rod clusters and the hexagonal phase of wurtzite structures can be obtained. The smaller diameter of AZO nanorods can be obtained at 12 times pre-treatment. In addition, the superior pH sensing response in pH 7∼12 buffer solutions at 6 times pre-treatment, the pH sensitivity is very high, and the pH response is linearity.