Diaphragm shape effect on the performance of foil-based capacitive pressure sensors

Khan, Sherjeel M.; Mishra, Rishabh; Qaiser, Nadeem; Hussain, Aftab M.; Hussain, Muhammad Mustafa

doi:10.1063/1.5128475

Cited by 28 publications

(13 citation statements)

References 41 publications

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“…As expected, an increase in capacitive sensor area increases the capacitance response, whereas a decrease in aspect ratio (width to length ratio) reduces the linearity response of the sensor. 38,39 Importantly, this analysis confirms that the form factors of the capacitor can be carefully fine-tuned to either increase the sensor sensitivity or its linearity. Additionally, the variation in the capacitance upon different applied pressure is an indication that the PEDOT:PSS top electrode is fully compressed and, as a result, pressure is sensed by the dielectric layer.…”

Section: Device Characterizationsupporting

confidence: 55%

Fabrication of an autonomously self-healing flexible thin-film capacitor by slot-die coating

Nagesh

Yousefi

et al. 2021

Mater. Adv.

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Section: Device Characterizationsupporting

confidence: 55%

Fabrication of an autonomously self-healing flexible thin-film capacitor by slot-die coating

Nagesh

Yousefi

et al. 2021

Mater. Adv.

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“…Moreover, the MEMS-based devices are naturally rigid which poses a major challenge for application on unconventional and unstructured surfaces, nevertheless, flexibility and compliance are needed due to the wide range of potential applications in electronic skin, soft robotics, and implantable/wearable devices in the modern era. [28][29][30][31][32] As a result, several active, soft, flexible, and stretchable materials have shown potential in soft actuation applications as will be discussed in this Review article. The considered active materials and corresponding stimuli in this Review article are shown in Figure 1.…”

Section: Why Rigid To Soft Actuators?mentioning

confidence: 99%

Soft Actuators for Soft Robotic Applications: A Review

El‐Atab

Mishra

Al‐Modaf

et al. 2020

Advanced Intelligent Systems

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331

224

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The compliant, continuum, and configurable robotics field in general has gained growing interest in the past years especially with the exciting advances in artificial intelligence technology, [1] which could enable various valuable applications ranging from manufacturing to safety and healthcare. [2,3] Soft robots are of notable interest because, unlike their rigid counterpart, they can easily deform while being mechanically resilient, [4,5] adapt to the outer environment without harm to humans, [6] and finally, enable low-cost manufacturing. [7] For robots to interact with the outer environment and complete tasks, a set of sensors and actuators need to be integrated into the system. Soft robots, in specific, present additional challenges because their sensing and actuation devices are generally highly integrated within the body of the robot and its whole functionality. These challenges become even more critical when the soft robot is scaled down to sub-centimeter size as the sensing, power, and data analysis units are moved off-board. As a result, miniaturized soft actuators that respond to various stimuli and show large deformations in addition to mechanical resilience are crucial. These would be particularly promising for application in artificial muscles, microrobots, and micro-manipulators. [8-10] Active and soft materials are promising for this task as they can be actuated through various external stimuli, such as photons, thermal, magnetic and/or electric field. Such materials range from particles, to polymers (either electroactive or shape memory), papers, fluids, shape memory alloys (SMAs), liquid metals, hydrogels, 2D materials, or a combination of these. [6-25] Nevertheless, some materials can be more suitable for a specific set of applications than others; for instance, materials stimulated by the near-infrared (NIR) spectrum are promising for biomedical applications, whereas sunlight-stimulated materials are suitable for nature-inspired soft robots used in outside environments. Various useful metrics are generally used to assess the performance of the actuators; these include the generated stress and strain, Young's modulus or measured stiffness, in addition to their power, work, energy, and force density. In this Review article, however, we focus on the application of the soft actuators in soft robotics where the reported metrics include mode and speed of actuation (or locomotion), power, voltage, current (of the driving signal), lifting force, and weight among others. In this Review article, different active materials that have been developed and used in soft actuators for soft robotics are discussed and grouped by the stimulus that generates the actuation response as shown in Figure 1. The physics of operation, resulting deformations, mechanical resilience, and their pros and cons are presented with a focus on the applications of the different soft

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“…Whitesides’ group at Harvard University, a pioneering group in paper-based sensors and essays, first introduced the idea of a disposable chromatography paper based piezoresistive force MEMS sensor that can be used as an accelerometer since it functions similarly to the silicon MEMS structures at the heart of MEMS accelerometers. , This work encouraged researchers to explore the development of such sensors using a paper-based fabrication approach in the following years. Examples of paper-based sensors developed in the literature include pressure, , humidity, and temperature sensors . In this section, the design, fabrication technique, and performance of some of the recent inertial sensors fabricated on paper substrates will be presented.…”

Section: Acceleration Sensors Based On Emerging Technologies and Mate...mentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Diaphragm shape effect on the performance of foil-based capacitive pressure sensors

Cited by 28 publications

References 41 publications

Fabrication of an autonomously self-healing flexible thin-film capacitor by slot-die coating

Fabrication of an autonomously self-healing flexible thin-film capacitor by slot-die coating

Soft Actuators for Soft Robotic Applications: A Review

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

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