2007
DOI: 10.1109/ted.2007.906966
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Device Modeling at Cryogenic Temperatures: Effects of Incomplete Ionization

Abstract: We present a device performance modeling methodology that self-consistently resolves device operation at cryogenic temperatures (T > 30 K) in conjunction with incomplete ionization effects that take into account the change in dopant activation energies as a function of doping. Using this methodology, we developed a device simulator that predicts n-channel MOSFET (NMOSFET) device characteristics for a wide range of temperatures by solving semiconductor equations, along with the Poisson equation. Comparison of o… Show more

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Cited by 68 publications
(30 citation statements)
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“…1). This doping profile gives a good match between experimental and measured data, and is in line with doping profiles deduced for this process using other device configurations [33]. More specifically, the peak concentration in and regions is cm , and this concentration drops with nm and nm in the depth and lateral directions assuming a shifted Gaussian profile where the mean is m away from the surface.…”
Section: B Doping Profile Modelsupporting
confidence: 86%
“…1). This doping profile gives a good match between experimental and measured data, and is in line with doping profiles deduced for this process using other device configurations [33]. More specifically, the peak concentration in and regions is cm , and this concentration drops with nm and nm in the depth and lateral directions assuming a shifted Gaussian profile where the mean is m away from the surface.…”
Section: B Doping Profile Modelsupporting
confidence: 86%
“…We use our in-house developed physics-based simulator to study MOSFET behavior in the ESD device configuration [4,5]. We simulate the ggNMOS and gsPMOS independently to obtain the charge concentrations, potentials and currents during operation.…”
Section: Simulation Results and Discussionmentioning
confidence: 99%
“…along with a suitable model for the activation energies E A and E D [5], [7]. Moreover, we consider models for the energy band gap and carrier mobilities that take the impurity density and temperature dependence into account.…”
Section: Device Concept and Charge Carrier Transportmentioning
confidence: 99%