Development of the ozone generation by the variation of auxiliary electrodes

Optimization of convex electrode geometry for surface discharge used for fabrication of the electrode groove on solar cells

“…However, for a fabrication process of busbar and finger electrodes, it is desired that the parts of the antireflection film where the electrodes will be formed are removed because the film functions as barrier in obtaining electric power. Therefore, we have proposed a novel formation technique for the electrode grooves using the surface discharge [1][2] which could produce a nonequilibrium plasma even at atmospheric pressure. Recently, we showed that a silicon nitride film on n + layer of pyramid-like shape was selectively etched against a silicon layer whereby electrode grooves of 220 μm width were formed along boundary lines between discharge electrodes covered with a dielectric layer and the film.…”

Effect of Generating Heat on Ozone Generation in Dielectric Cylinder-Cylinder DBD Ozone Generator

“…However, some ozone generator configurations generate inhomogeneous heat-up of the dielectric barrier and result in the decrease of ozone production efficiency. Experimental studies concerning ozone generator configuration such as electrode arrangements, gap lengths, dielectric materials, operating gases and electrical discharges have been widely studied to obtain the optimum discharge conditions for high yield ozone production [8][9][10][11][12][13][14][15][16][17].…”

Designing of Single Switching DBD Ozone Generator. (Dept. E)

“…However, some of ozone generator configurations generate inhomogeneous heating of the dielectric barrier resulting in low ozone production efficiency. Experimental studies regarding the construction of the ozone generator such as electrode arrangements [6][7][8][9][10], dielectric material [11], chamber geometry [12][13][14][15][16][17], power source construction [18][19][20], gas type (dry air or oxygen) [11], feed gas flow rate and operation pressure [21] have been extensively studied to obtain an optimal level discharge conditions for highthroughput ozone production.…”