Development of a Radiofrequency Plasma Diagnostic System with a Langmuir Probe and Study of a Capacitively Coupled Argon Plasma

Mendil, Djelloul; Lahmar, H.; Ouadjaout, D.; Henni, Laid; Boufendi, Laïfa; Louhibi, D.; Henda, K.

doi:10.4028/www.scientific.net/amr.227.204

Cited by 1 publication

(3 citation statements)

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“…Fig. 3 shows the measured EEDFs based on the Druyvesteyn method [16,22] performed by the Langmuir probe. The result reveals a bi-Maxwellian distribution of the EEDFs with two electron groups and its shape remains the same through the radial positions.…”

Section: Resultsmentioning

confidence: 99%

“…The experiment details are already reported in a previous work [16] . Briefly, the apparatus consists of a cylindrical stainless steel chamber with 215 mm inner diameter and 204 mm height.…”

Section: Experimental Set-upmentioning

confidence: 99%

“…The probe was shifted horizontally in the radial direction (0 cm≤ r ≤ 9 cm) from the center of the interelectrode region to the cylindrical chamber wall. In the generated plasma, a passive compensation method with self-resonant RF choke inductors was used to minimize the RF disturbance [3,16,17] . For that purpose the RF fundamental of 13.56 MHz and its harmonics were filtered.…”

Section: Experimental Set-upmentioning

confidence: 99%

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Spatial Evolution Study of EEDFs and Plasma Parameters in RF Stochastic Regime by Langmuir Probe

Mendil

Lahmar

Boufendi

2014

Plasma Sci. Technol.

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An RF compensated cylindrical Langmuir probe system has been developed and used to characterize an RF capacitive two temperature plasma discharge in a stochastic mode. The novelty of the work presented here is the use of the driven electrode (cathode) without ground shield. Measurements of the electron energy distribution function (EEDF) and plasma parameters were achieved under the following conditions: 50 W of RF power and 5×10 −2 mbar of argon pressure. The probe measurements are performed at 3 cm above the electrode and the probe was shifted radially (r direction) from the center (r = 0 cm) of the inter-electrodes region towards the chamber wall (R = 10.75 cm). The results show that the EEDF is bi-Maxwellian and its shape remains the same through the scanned region. The farther the probe from the central region, the lower the EEDF maximum. The plasma density is observed to decrease according to a Gaussian profile along the radial direction and falls to 50% of its maximum when close to the cathode edge (r = 5.5 cm). At the same time the effective electron temperature remains constant for r<4 cm and increases for r≥4 cm. The high-temperature and low-temperature electrons' densities and temperatures are also discussed in the article.

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Section: Resultsmentioning

confidence: 99%

Section: Experimental Set-upmentioning

confidence: 99%