In the paper analysis of surface defect with a use of optical scanners was presented. Traditionally surface features on the top of surface layers is investigated by means of topography measurements in micro scale. In this case, asperities were much bigger, after surface treatment with aggressive media, and reaching as much as 1 millimetre. Due to this, analysis was conducted with optical scanner (using structural light or laser beam) and followed by appropriate data transmission, filtration and calculation procedures implemented in topography software. It proved that all important defects on the surface were properly detected. Dimensions of defects could be also inspected in all directions, as well as volume features and fractal dimension.