Development, Modeling, and Control of a Micro-/Nanopositioning 2-DOF Stick–Slip Device

Abstract

The works presented in this article are motivated by the high performances required in micromanipulation/microassembly tasks. For that, this paper presents the developement, the modelling and the control of a 2 degrees of freedom (in linear and angular motion) micropositioning device. Based on the stick-slip motion principle, the device is characterized by unlimited strokes and submicrometric resolutions. First, experiments were carried out to characterize the performances of the micropositioning device in resolution and in speed. After that, a state-space model was developed for the sub-step functioning. Such functioning is interesting for a highly accurate task like nanopositioning. The model is validated experimentally. Finally, a controller was designed and applied to the micropositioning device. The results show good robustness margins and a response time of the closed-loop system.

Modeling and control of piezoelectric inertia–friction actuators: review and future research directions

“…In Rakotondrabe et al (2009), a state-space model of PIFAs was presented. This model is only for one period of motion.…”

“…For instance, in Rakotondrabe et al (2008), the voltage and frequency were taken as two control inputs. The output was the displacement.…”

“…It should be noted that the inchworm actuator (Shamoto et al, 2000;Shamoto and Moriwaki, 1997) is different from the PIFA, so the present paper does not cover the inchworm. A detailed elaboration on the difference between the PIFA and the inchworm can be found in Zhang et al (2012) and Ouyang et al (2008).…”

ARM Based Automatic Control System of Nano Positioning Stage for Micromanufacturing

“…Most of the works in this area have dealt with the development of control approaches to perform tasks such as positioning, orientation, picking, placing, and insertion of the different micro objects in grids or in between plates [13]. Enabling a 2 DOF through a Piezo actuator can foray its use in Characterization of microdevices, Manufacturing and assembly of micro devices, High resolution industrial applications such as optical fiberalignment, biological cell manipulation, and scanning probe microscopy (SPM) [2,3,4,13].…”

Vibrational self-alignment of a rigid object exploiting friction

“…In [9], resonant magnetic microagents are used to move micro-robots using magnetic fields and vision-feedback for positioning applications. Modeling and closed-loop control of a 2-DOF micro-positioning device, using stick-slip motion based on piezoelectric materials, is treated in [17]. The work in [18] studies the use of a planar manipulator to position multiple objects on a vibrating surface using the frictional forces along with feedback control.…”