Determination of thickness uniformity of a transparent film based on in-plane ESPI and radial basis function

Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape

“…In addition, several non-destructive measurement systems have been used to reconstruct the 3D shape of transparent objects [6][7][8] . Various interferometric methods have been presented to determine the parameters because the accuracies are not affected by the small loss in the sample [9][10][11][12] . To simplify the process, improve the experimental efficiency, and reduce the cost of the measurement, some approaches have been developed to measure the characteristics simultaneously [13,14] .…”