Determination of the surface reactivity of growth species in the AP-MOCVD of ZnO from DEZ and H2O and thermal analysis of the “captured” intermediate species

Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy

“…We surveyed the literature for the thermal decomposition properties of Zn(OH) 2 obtained by various methods. In the study of Srivastava and Secco [16], they observed that e-Zn(OH) 2 decomposes in a single step beginning at 130 1C with Table 1 of [8]). SEM images are ZnO films deposited on silicon substrate with micron-size trench at the respective temperatures.…”

“…In a separate experiment, we also determined the sticking coefficients of the gaseous intermediates as a function of the reactor temperature [8]. Fig.…”

“…Diethylzinc (Zn(C 2 H 5 ) 2 ), (DEZ), is commonly used as Zn source due to its high vapor pressure. Various oxygen sources have been used such as oxygen (O 2 ) [4,5], water (H 2 O) [6][7][8][9], carbon dioxide (CO 2 ) [10,11], alcohols [12], and nitrous oxide (N 2 O) [13]. The oxygen source should largely affect the quality of the grown ZnO film, but it is yet unclear as to which is the optimum choice.…”

“…It is important, therefore, to understand the growth processes in each of these chemical vapor deposition (CVD) systems. We recently reported the molecular sizes [7] and sticking probabilities [8] of the intermediate species as a function of temperature in the MOCVD of ZnO from DEZ and H 2 O. In this paper, we use simultaneous thermogravimetric analysis-differential thermal analysis (TGA-DTA) and quadrupole mass spectrometry (QMS) to analyze the intermediates in the reaction of DEZ with H 2 O.…”