Design of Vernier-ring reflectors in thick Si3N4 platform

Chatzitheocharis, Dimitrios; Ketzaki, Dimitra; Patsamanis, Georgios; Chrysostomidis, Themistoklis; Roumpos, Ioannis; Sacchetto, Davide; Zervas, Michael; Vyrsokinos, K.

doi:10.1117/12.2583226

Cited by 4 publications

(2 citation statements)

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“…According to Ref. 37, the propagation loss of the fabricated Si3normalN4 waveguides based on LAT is ∼20 dB/m. In contrast, using our proposed high multimode structure, the propagation loss is successfully reduced from 20 to 3.3 dB/m.…”

Section: Device Fabrication and Measurementmentioning

confidence: 81%

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

et al. 2023

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Silicon nitride (Si 3 N 4 ) waveguides with high confinement and low loss have been widely used in integrated nonlinear photonics. Indeed, state-of-the-art ultralow-loss Si 3 N 4 waveguides are all fabricated using complex fabrication processes, and all of those reported that high Q microring resonators (MRRs) are fabricated in laboratories. We propose and demonstrate an ultralow-loss Si 3 N 4 racetrack MRR by shaping the mode using a uniform multimode structure to reduce its overlap with the waveguide. The MRR is fabricated by the standard multi project wafer (MPW) foundry process. It consists of two multimode straight waveguides (MSWs) connected by two multimode waveguide bends (MWBs). In particular, the MWBs are based on modified Euler bends, and an MSW directional coupler is used to avoid higher-order mode excitation. In this way, although a multimode waveguide is used in the MRR, only the fundamental mode is excited and transmitted with ultralow loss. Meanwhile, thanks to the 180 deg Euler bend, a compact chip footprint of 2.226 mm perimeter with an effective radius as small as 195 μm and a waveguide width of 3 μm is achieved. Results show that based on the widely used MPW process, a propagation loss of only 3.3 dB∕m and a mean intrinsic Q of around 10.8 million are achieved for the first time.

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Section: Device Fabrication and Measurementmentioning

confidence: 81%

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

et al. 2023

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“…We apply the transmission matrix method to model the output spectrum of the Vernier cascaded MRR filter [22], adopting 0.8 µm thick Si 3 N 4 waveguides for the ultralow propagation loss [2] to improve the laser cavity lifetime for a narrow linewidth. The radii of the two MRRs are selected at R 1 = 116.3741 µm and R 2 = 117.7747 µm respectively, in order to avoid bending losses and keep the ER high enough [23].…”

Section: Simulation Of Spectral Characteristicsmentioning

confidence: 99%

Ultrabroadband vernier cascaded microring filters based on dispersive Si₃N₄ waveguides

Lin,

Lu,

Zhou

et al. 2024

J. Opt.

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A viable candidate for use in silicon photonics and microwave photonics is the hybrid external cavity laser chip, which offers a high sidemode suppression ratio, ultrabroadband mode-hopping-free tuning range, and small linewidth. It requires a photonic filter device with an ultrabroadband operating bandwidth and adjustable frequency selection capability. The Vernier cascaded microring filter is a prevailing filter technique that usually ignores chromatic dispersion and will result in noticeable frequency variations, particularly over a large frequency range. Based on dispersive Si3N4 waveguides, we develop ultrabroadband Vernier cascaded microring filters and examine the impact of chromatic dispersion. For the same waveguide geometry, the filter's effective free spectral range (FSR) varies by more than 400 GHz with and without the dispersion. Furthermore, these Vernier filters, which are made of anomalous and normal dispersive waveguides respectively, exhibit mode hopping at the opposite frequency side. It leads to a sudden mode number leap and, consequently, a diversified dispersion condition for the convoluted filtering frequency. We show that this phenomenon is caused by the interplay between half of the FSR difference, and the accumulated frequency difference caused by the chromatic dispersion. Finally, the use of thermal-optical tuning enables accurate frequency tuning. Our findings offer a valuable resource for the engineering of hybrid external cavity lasers at the chip scale.

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Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q

Cui,

Cao,

Pan

et al. 2023

2023 Opto-Electronics and Communications Conference (OECC)

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Design of Vernier-ring reflectors in thick Si3N4 platform

Cited by 4 publications

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Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Ultrabroadband vernier cascaded microring filters based on dispersive Si₃N₄ waveguides

Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q

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Design of Vernier-ring reflectors in thick Si3N4 platform

Cited by 4 publications

References 0 publications

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Compact microring resonator based on ultralow-loss multimode silicon nitride waveguide

Ultrabroadband vernier cascaded microring filters based on dispersive Si3N4 waveguides

Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q

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Ultrabroadband vernier cascaded microring filters based on dispersive Si₃N₄ waveguides