Design of Mems Based Piezoelectric Energy Harvester for Pacemaker

Anand, Ashutosh; Kundu, Sudip

doi:10.1109/devic.2019.8783311

Cited by 18 publications

(2 citation statements)

References 11 publications

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“…The rapid improvement of the electronic devices in reducing their size, lowering the electric power needed, the rapid technology in improving material properties, and Micro-Electromechanical Systems (MEMS) technology opens the door in front of modelling and fabrication of self-powered devices by harvesting the available ambient power and converting it into usable electrical power [1]- [24]. This eliminates the need for replacing traditional batteries, since its replacement is difficult, costly, and needs medical surgery, especially in medical implants [1]- [4]. In the last two decades, the researchers have established power harvesting devices and fabricated it to power small electronic devices [5], based on the electrostatic method [6], electromagnetic [7] and piezoelectric effects [8]- [10], [22], [23].…”

Section: Introductionmentioning

confidence: 99%

Quality and Damping Factors Optimization Using Taguchi Methods in Cantilever Beam Based Piezoelectric Micro-Power Generator for Cardiac Pacemaker Applications

Alrashdan

2020

IREMOS

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Piezoelectric Micro-Power Generator (PMPG) can produce electrical power as a result of piezoelectric effects. Moreover, producing self-powering devices, especially in small electronic devices with low power requirements such as cardiac pacemakers is one of the objectives of the study. This paper optimizes the quality and damping factors for PMPG by using the Taguchi optimization method instead of a trial and error approach. Eight physical control parameters with three levels, including PMPG layer materials and dimensions are selected in order to study the influence of each parameter of PMPG quality and damping factors. Level eighteen Orthogonal arrays is based on signal-to-noise ratio which is conducted and confirmed by using analysis of variance in determining the PMPG with the best quality and damping factor.18 experiments are conducted with three trials using COMSOL Multiphysics software ver. 5.4 for each one. The PMPG maximum quality factor, the lower damping factor, and the highest efficiency are designed at 1.35 Hz, which is equivalent to 81 beats per min. Both Taguchi and the analysis of variance results conclude that the highest PMPG physical control parameters affect the quality and damping factors at 1.35 Hz from higher to lower order as follows: insulator width of 0.12 mm, 0.2 mm piezoelectric layer width, 20 µm of insulator thickness, 2.5 mm of proof mass thickness, piezoelectric material of PZT5A, piezoelectric layer thickness of 60 µm, proof mass material of aluminum, and 5 mm proof mass length respectively. COMSOL Multiphysics is used again to study the PMPG with the best parameters, the PMPG resonates at 1.

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Section: Introductionmentioning

confidence: 99%

Quality and Damping Factors Optimization Using Taguchi Methods in Cantilever Beam Based Piezoelectric Micro-Power Generator for Cardiac Pacemaker Applications

Alrashdan

2020

IREMOS

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“…MEMS pressure sensors detect the pressure level by generating an electrical signal output proportional to the applied pressure. Up to now, there are five standard transduction mechanisms used for pressure sensing are piezoresistive, capacitive, piezoelectric, optical, and resonant pressure sensing [18][19][20]. Among mentioned transduction mechanisms for MEMS pressure sensors, piezoresistive and capacitive mechanism have been mostly used.…”

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confidence: 99%

An Efficient Design of the Piezoresistive Pressure Sensor Applied for Micro Aerial Vehicle

Pham¹,

Nguyen²,

Le³

et al. 2023

IJIE

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In this research, the developing process of a piezoresistive pressure sensor working in the atmosphere environment applied in micro aerial vehicle using the MEMS fabrication method is introduced. The sensor consists of four Au/Cr piezoresistors in a Wheatstone bridge configuration on a wet oxidized silicon diaphragm. To fabricate the sensor, three lithographic steps were conducted: the first one is to define the resistors and Au/Cr lines/pads, the second and the third ones are to determine the width and the thickness of the square SiO2/Si diaphragm, respectively. The sensor diaphragm shape and thickness were defined by the anisotropic etching of Si in tetramethylammonium hydroxide (TMAH) solution, and the resistors array are formed by sputtering and wet etching method. The sensor size is 6000 μm by 6000 μm. The sensor output voltage was measured for various applied pressure levels from -0.9to 1.2 bar with 5V voltage supply. The fabricated pressure sensor also exhibits a sensitivity of 50.1 mV/bar

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Stress Enhancement in the Piezoelectric Cantilever with Tapered Substrate and Piezoelectric Layer Thickness

Anand

Pal

Kundu

2021

Lecture Notes in Electrical Engineering

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Design of Mems Based Piezoelectric Energy Harvester for Pacemaker

Cited by 18 publications

References 11 publications

Quality and Damping Factors Optimization Using Taguchi Methods in Cantilever Beam Based Piezoelectric Micro-Power Generator for Cardiac Pacemaker Applications

Quality and Damping Factors Optimization Using Taguchi Methods in Cantilever Beam Based Piezoelectric Micro-Power Generator for Cardiac Pacemaker Applications

An Efficient Design of the Piezoresistive Pressure Sensor Applied for Micro Aerial Vehicle

Stress Enhancement in the Piezoelectric Cantilever with Tapered Substrate and Piezoelectric Layer Thickness

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