2015 15th International Conference on Control, Automation and Systems (ICCAS) 2015
DOI: 10.1109/iccas.2015.7364891
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Design of a high-speed, short-stroke xy-stage with counterbalance mechanisms

Young-bong Bang
1
,
Chang-Hyuk Lee
2
,
Sung Yon Cho
3
et al.
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