Design Issues of Piezoresistive MEMS Accelerometer for an Application Specific Medical Diagnostic System

Biswas, Sonali; Gogoi, Anup Kumar

doi:10.1080/02564602.2015.1065713

Cited by 14 publications

(5 citation statements)

References 3 publications

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“…When the diaphragm is subjected to acoustic pressure, it will begin to move in harmony with the source. Moreover, MEMS capacitance sensors have the advantages of being small-sized, mass-producible, thermally stable, and more suitable for wearable applications [75] .…”

Section: Ecg Sensingmentioning

confidence: 99%

Current Status and Development Tendency of Wearable Cardiac Health Monitoring

Wang

Zhao

2023

Chin. J. Electr. Eng.

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Wearable cardiac monitoring devices can provide uninterrupted monitoring of cardiac activities over a long period of time. They have developed rapidly in recent years in terms of convenience, comfort, and intelligence. Aided by the development of sensor and materials technology, big data and artificial intelligence, wearable cardiac monitoring can become a crucial basis for novel medical models in the future. Herein, the basic concepts and representative devices of wearable cardiac monitoring are first introduced. Subsequently, its core technologies and the latest representative research progress in physiology signal sensing, signal quality enhancement, and signal reliability are systematically reviewed. Finally, an insight and outlook on the future development trends and challenges of wearable cardiac monitoring are discussed.

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Section: Ecg Sensingmentioning

confidence: 99%

Current Status and Development Tendency of Wearable Cardiac Health Monitoring

Wang

Zhao

2023

Chin. J. Electr. Eng.

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“…Microelectromechanical system (MEMS) accelerometers are the crucial inertial sensors that find extensive applications in fields such as inertial navigation [ 1 , 2 , 3 , 4 ], vibration measurement [ 5 , 6 , 7 ], medical diagnosis [ 8 , 9 , 10 ], health monitoring [ 11 , 12 , 13 ], and disaster warning [ 14 , 15 , 16 ]. Presently, there is a growing demand for MEMS accelerometers with small sizes, high sensitivity, and superior stability [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Zhang

et al. 2023

Micromachines

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In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four piezoelectric cantilever beams. In order to enhance the sensitivity of the accelerometer, the Sc0.2Al0.8N piezoelectric film is used in the device. The transverse piezoelectric coefficient d31 of the Sc0.2Al0.8N piezoelectric film is measured by the cantilever beam method and found to be −4.7661 pC/N, which is approximately two to three times greater than that of a pure AlN film. To further enhance the sensitivity of the accelerometer, the top electrodes are divided into inner and outer electrodes; then, the four piezoelectric cantilever beams can achieve a series connection by these inner and outer electrodes. Subsequently, theoretical and finite element models are established to analyze the effectiveness of the above structure. After fabricating the device, the measurement results demonstrate that the resonant frequency of the device is 7.24 kHz and the operating frequency is 56 Hz to 2360 Hz. At a frequency of 480 Hz, the sensitivity, minimum detectable acceleration, and resolution of the device are 2.448 mV/g, 1 mg, and 1 mg, respectively. The linearity of the accelerometer is good for accelerations less than 2 g. The proposed piezoelectric MEMS accelerometer has demonstrated high sensitivity and linearity, making it suitable for accurately detecting low-frequency vibrations.

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“…Progression in the fields like micro-electronics and in the micro-technologies significantly impacted modernization in e-medicine. Advancement in such technologies has provided an expansion and the development of miniaturization of size of the devices applied for sensing, imaging and diagnosis [17][18] . Moreover, its connection with IoT technologies resulted in proficient, better data processing of "big-data" associated with the diagnosis and health monitoring purpose.…”

Section: Introductionmentioning

confidence: 99%

Internet of Diagnostic Things: Emerging Horizon towards Precision and Digital Health Care

Verma¹,

Mishra

Bisht

et al. 2021

J Health Sci Res

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Digital revolution and advancement of information technologies, smart phone industry, multi-omic technologies, availability with 5G networks and emergence of big data era has greatly impacted on diagnostic, biomedical and e-healthcare sectors. Intelligent sensors, wearable, digital imaging, smart phone based diagnostic and connected networking provides smart approach and platform towards precision diagnostics. Recently, Internet of Things (IoT) have shown remarkable impact on diverge sectors such as digital imaging, smart sensing, digital diagnostic, digital biotech, telemedicine, precision farming, lab-on phone, smart home, smart city planning, smart retails and Research and Development (R&D) automation etc. Application of IoT technology in diagnostic and healthcare opens a way for personalization in the medical care depending on individual needs, additionally giving option for well-organized way for remote healthcare and management. This review focuses on theoretical, technological, advanced aspects of digital diagnostic utilizing IoT technology. Furthermore, we have also highlighted the opportunities and challenges for IoT in exploring the futuristic scope and innovation in diagnostic application. IoT based diagnostic, sensing and imaging devices provides unprecedented precision, automation in the diagnostic and thereby could significantly improve the biomedical and e-healthcare area.

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Design Issues of Piezoresistive MEMS Accelerometer for an Application Specific Medical Diagnostic System

Cited by 14 publications

References 3 publications

Current Status and Development Tendency of Wearable Cardiac Health Monitoring

Current Status and Development Tendency of Wearable Cardiac Health Monitoring

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Internet of Diagnostic Things: Emerging Horizon towards Precision and Digital Health Care

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