Design, Fabrication, and Testing of a Modular Magnetic Field Microsensor on a Flexible Polymer Foil

Griesbach, Tim; Wurz, Marc Christopher; Rissing, Lutz

doi:10.1109/tmag.2012.2198798

Cited by 16 publications

(14 citation statements)

References 2 publications

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“…It creates very straight flanks in the silicon revealing a silicon grid of 200 µm width. The frame spans the manufactured sensors and enables an easy separation by using a stamping tool ( Figure 7 ) [ 56 , 57 , 58 ].…”

Section: Current Developmentsmentioning

confidence: 99%

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Jogschies

Klaas

Kruppe

et al. 2015

Sensors

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229

113

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The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling).

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Section: Current Developmentsmentioning

confidence: 99%

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Jogschies

Klaas

Kruppe

et al. 2015

Sensors

Self Cite

229

113

View full text Add to dashboard Cite

show abstract

“…Specifically, technique such as embedding sensing nanowire body inside the porous polymer film [20] and polymer on silicon technology [21] have been used to fabricate the flexible AMR sensor.…”

Section: B Amr Sensorsmentioning

confidence: 99%

Towards flexible magnetoelectronics for robotic applications

Heidari

Liu

Dahiya

2017

2017 2nd Asia-Pacific Conference on Intelligent Robot Systems (ACIRS)

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Abstract-This paper presents the technological advancements in the field of flexible magnetic sensors for robotics applications. Various magnetic devices (e.g. Hall, GMR, AMR and TMR) have been studied and their suitability for flexible application has been presented. Further, the system level integration of magnetic sensors in robotics is briefly discussed. With rapid development in flexible electronics, a robot with multi-functional conformable electronic skin will be possible in the foreseeable future. This will also open new avenues for a wide range of other applications including wearable electronics and interactive electronic-skin for robots and prosthesis.

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“…The major limitation remains on the material science side, primarily due to the use of magnetic layer stacks, which are in-plane magnetized and, hence, are mainly sensitive to magnetic fields oriented in the sensor plane. [13,15,16,[19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] The use of proximity sensors with inplane sensitivity encumbers the readout of touchless on-skin switches, as magnetic objects approaching from directions other than the out-of-plane axis can falsely trigger switching. Introducing flexible Hall effect sensors [36][37][38][39] could provide a solution to this conundrum, however, they cannot be intrinsically tuned to be bistable as needed for switches, and thus require additional flexible electronic modules.…”

Section: Introductionmentioning

confidence: 99%

Flexible Magnetoreceptor with Tunable Intrinsic Logic for On‐Skin Touchless Human‐Machine Interfaces

Makushko

Mata

Bermúdez

et al. 2021

Adv Funct Materials

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Artificial magnetoception is a new and yet to be explored path for humans to interact with the surroundings. This technology is enabled by thin film magnetic field sensors embedded in a soft and flexible format to constitute magnetosensitive electronic skins (e-skins). Being limited by the sensitivity to in-plane magnetic fields, magnetosensitive e-skins are restricted to basic proximity and angle sensing and are not used as switches or logic elements of interactive wearable electronics. Here, a novel magnetoreceptive platform for on-skin touchless interactive electronics based on flexible spin valve switches with sensitivity to out-of-plane magnetic fields is demonstrated. The technology relies on all-metal Co/Pd-based spin valves with a synthetic antiferromagnet possessing perpendicular magnetic anisotropy. The flexible magnetoreceptors act as logic elements, namely momentary and permanent (latching) switches. The switches maintain their performance even upon bending to a radius of less than 3.5 mm and withstand repetitive bending for hundreds of cycles. Here, flexible switches are integrated in on-skin interactive electronics and their performance as touchless human-machine interfaces is demonstrated, which are intuitive to use, energy efficient, and insensitive to external magnetic disturbances. This technology offers qualitatively new functionalities for electronic skins and paves the way towards full-fledged on-skin touchless interactive electronics.

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Design, Fabrication, and Testing of a Modular Magnetic Field Microsensor on a Flexible Polymer Foil

Cited by 16 publications

References 2 publications

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Recent Developments of Magnetoresistive Sensors for Industrial Applications

Towards flexible magnetoelectronics for robotic applications

Flexible Magnetoreceptor with Tunable Intrinsic Logic for On‐Skin Touchless Human‐Machine Interfaces

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