Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions

Degani, Ofir; Nemirovsky, Y.

doi:10.1109/84.982859

Cited by 77 publications

(63 citation statements)

References 14 publications

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“…Most of the literatures focus on the torsional motion of the micromirror, especially on the pull-in phenomenon (Degani et al 1998;Degani and Nemirovsky 2002;Zhang et al 2001). Some researchers also have investigated the dynamic characteristics of the micromirror Strozewski et al 1993;Fischer et al 1998;Sattler et al 2002;Evoy et al 1999;Kurth et al 1998), but few of them considered the coupled model of vertical translational and torsional motion simultaneously.…”

Section: Introductionmentioning

confidence: 98%

A study on the coupled dynamic characteristics for a torsional micromirror

Zhao

Chen

2005

Microsyst Technol

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A nonlinear dynamic model of an electrostatic torsional micromirror considering the coupled effect of the torsion and vertical bending motion of its torsional beam simultaneously is presented. The effect of the vertical deformation of the mirror plate and the distributed mass of the torsion beam are also considered in this model. The validity of the model is verified by a finite element simulation with ANSYS. Undamped and damped responses of the torsional and vertical vibration of the micromirror are analyzed by the model given here. The results of the simulation indicate that this model can simulate the dynamic behaviors of the micromirror fast and accurately.

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Section: Introductionmentioning

confidence: 98%

A study on the coupled dynamic characteristics for a torsional micromirror

Zhao

Chen

2005

Microsyst Technol

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“…This numerical approach is extremely accurate, but requires successive numerical solutions of a complex nonlinear algebraic equation. To alleviate these shortcomings, other researchers (Degani et al 1998;Nemirovisky and Degani 2001;Degani and Nemirovisky 2002;Zhang et al 1999;Zhang et al 2001) developed analytical methods to calculate the pull-in parameters of a 1-DOF lumped-mass torsional micromirror. Degani and Nemirovsky (2001) were the first to introduce a 2-DOF lumped-mass model that includes both torsion and bending to capture the static behavior of a torsional microactuator.…”

Section: Introductionmentioning

confidence: 99%

Towards a stable low-voltage torsional microscanner

2008

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Torsional micromirrors emerged recently as an effective means of light manipulation. Their fast response, low wavelength sensitivity, and easy mass production have made them an attractive technology to implement optical switching and scanning applications. In this work, we developed a rigorous model of an electrically-actuated torsional micromirror. We verified the model against experimental data and conducted a convergence analysis to determine the minimum size of a reduced-order model (ROM) capable of representing the microscanner response accurately. We used the optimal ROM to study the dynamics of a microscanner. We found that the microscanner response exhibits a softening-type nonlinearity whose magnitude increases as the magnitude of the bias voltage increases. This nonlinearity results in multiple stable solutions at excitation frequencies close to but less than the natural frequency of the first mode. Operating the mirror in this region can cause abrupt jumps in the mirror response, thereby degrading the scanner performance. Furthermore, for a certain voltage range, we observed a two-to-one internal resonance between the first two modes. Due to this internal resonance, the mirror exhibits complex dynamic behavior, which degrades the microscanner's performance. We formulated a simple design rule to avoid this problem.

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“…By simply applying a voltage, both the electrostatic and the mechanical Casimir torques, which originate from the normal Casimir force [19][20][21][22][23][24], can rotate the movable electrode towards the fixed one. However, under certain conditions it can undergo jump-to-contact, which could lead to stiction [25].…”

Section: Introductionmentioning

confidence: 99%

Dependence of chaotic actuation dynamics of Casimir oscillators on optical properties and electrostatic effects

et al. 2018

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Abstract. With Casimir and electrostatic forces playing a crucial role for the performance and stability of microelectromechanical systems (MEMS), the presence of chaotic behavior, which is often unavoidable, leads to device malfunction due to stiction. Therefore, we investigate here how the optical properties of different materials influence the chaotic behavior of electrostatic torsional MEMS due to changes in magnitude of the Casimir forces and torques. We consider the materials Au, which is a good conductor, AIST, which is a phase change material being close to metal in the crystalline state, and finally doped SiC as a very poor conductor. For the conservative systems, there is no chaotic behavior and the analysis of phase portraits and bifurcation diagrams reveal the strong sensitivity of stable actuation dynamics on the material optical properties, while applied electrostatic potentials lead faster to instability and stiction for higher conductivity materials. For the driven systems, the Melnikov method is used to study the chaotic behavior. The results from this method are supported by the study of the contours of the transient time to stiction in the phase plane, which reveal a substantially increased chaotic behavior for higher conductivity materials, associated with stronger Casimir torques and applied electrostatic potentials.

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Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions

Cited by 77 publications

References 14 publications

A study on the coupled dynamic characteristics for a torsional micromirror

A study on the coupled dynamic characteristics for a torsional micromirror

Towards a stable low-voltage torsional microscanner

Dependence of chaotic actuation dynamics of Casimir oscillators on optical properties and electrostatic effects

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