2007 IEEE International Electron Devices Meeting 2007
DOI: 10.1109/iedm.2007.4418930
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Design Considerations for Complementary Nanoelectromechanical Logic Gates

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Cited by 138 publications
(78 citation statements)
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“…By doing so, the 'off' leakage current can be ideally zero that is a very big advantage of NEM relays over MOSFET devices suffering a large amount of 'off' leakage. The demerit of NEM relays is that its electrostatic actuation of mechanical channel causes much longer switching time than the electrical channel's fast switching time [3,6]. Considering both the advantage and disadvantage of NEM relays, the NEM-relay circuits can be considered very suitable to applications that are energy-efficient and slow, such as power-related circuits [7,8].…”
Section: Introductionmentioning
confidence: 99%
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“…By doing so, the 'off' leakage current can be ideally zero that is a very big advantage of NEM relays over MOSFET devices suffering a large amount of 'off' leakage. The demerit of NEM relays is that its electrostatic actuation of mechanical channel causes much longer switching time than the electrical channel's fast switching time [3,6]. Considering both the advantage and disadvantage of NEM relays, the NEM-relay circuits can be considered very suitable to applications that are energy-efficient and slow, such as power-related circuits [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…NEM relays are composed of 4 terminals like MOSFET devices. However, in NEM relays, the mechanical channel is actuated by electrostatic force, instead of the electrical channel [2][3][4][5][6]. When the channel is turned off in NEM relays, it is disconnected mechanically from the both source and drain.…”
Section: Introductionmentioning
confidence: 99%
“…Nano-electro-mechanical (NEM) switches have been suggested as a promising candidate for replacing the CMOS technology [6]. NEM switches provide some unique characteristics which are not available in conventional MOS, such as near-zero leakage current and infinite subthreshold slope.…”
Section: Introductionmentioning
confidence: 99%
“…Such characteristics make NEMs ideal for designing highly energy-efficient structures. However, NEMs have relatively long mechanical switching delay [6] compared to the intrinsic delay of CMOS devices, and to this date, they suffer from low endurance [15]. To get the best of both worlds, researchers have combined NEMs and CMOS to build low-power and high performance circuits for critical components [9], [10].…”
Section: Introductionmentioning
confidence: 99%
“…The use of mechanical switches for computing is not a new idea, and dates back to the 1930s [14]. Due to advancements in planar processing technology over the past few decades, particularly the development of surface micromachining processes for micro-electro-mechanical systems (MEMS) [15], there has been renewed interest in mechanical computing for ultra-low-power digital logic applications [16,17]. This paper reviews recent work toward the goal of achieving nano-electro-mechanical (NEM) logic switches suitable for low-power computing.…”
Section: Introductionmentioning
confidence: 99%