Design and simulation of a resonance-based MEMS viscosity sensor

Vishnampet, Deeksha Shridhar; Yenuganti, Sujan; Paliwal, Sankalp; Peparthi, Mythili; Panneerselvam, Kavitha

doi:10.1007/s10825-023-02114-9

J Comput Electron

2023

DOI: 10.1007/s10825-023-02114-9

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Design and simulation of a resonance-based MEMS viscosity sensor

Deeksha Shridhar Vishnampet,

Sujan Yenuganti,

Sankalp Paliwal

et al.

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2024

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Cited by 1 publication

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A piezoelectric sensor with high accuracy and reduced measurement error

Ghemari,

Belkhiri,

Saad

2024

J Comput Electron

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In this work, the main focus is on studying the effects of piezoelectric materials and exploring the functionality of piezoelectric sensors. The physical behavior of the sensor is thoroughly examined and a mathematical formula relating the accuracy of the sensor to relative movement or vibratory displacement is derived. The developed model is veri ed through simulations and experimental tests. By carefully selecting the appropriate damping rate, it is possible to enhance the parameters of the piezoelectric sensor and advance the technique of vibratory analysis. Overall, this research aims to enhance our understanding of piezoelectric materials and sensors, and how they can be effectively utilized in various applications involving vibratory analysis. The ndings from this study can contribute to better design and implementation of piezoelectric sensors, improving their accuracy and effectiveness in capturing and analysing vibratory movements.

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A piezoelectric sensor with high accuracy and reduced measurement error

Ghemari,

Belkhiri,

Saad

2024

J Comput Electron

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Design and simulation of a resonance-based MEMS viscosity sensor

Cited by 1 publication

References 18 publications

A piezoelectric sensor with high accuracy and reduced measurement error

A piezoelectric sensor with high accuracy and reduced measurement error

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