Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems

Kim, Won-jong; Verma, Sandeep; Shakir, Huzefa

doi:10.1016/j.precisioneng.2007.02.001

Cited by 84 publications

(42 citation statements)

References 13 publications

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“…This is possible with modern permanent magnet materials like NdFeB. Of particular interest for this work are the stages presented in [11]. By using a 2-axis actuator in which a single magnet in the mover provides two perpendicular forces together with two stationary coils [12], Kim et al achieves 6-axis actuation with only three moving magnets.…”

Section: Conceptual Designmentioning

confidence: 99%

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6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

2012

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Section: Conceptual Designmentioning

confidence: 99%

“…The MAGOS stage presents a similar architecture to the stage that was exhibited in [11], but uses a novel type of a compact 2-axis Lorentz actuator that is explained in Section 2.2. It uses photo-transistors for position sensing.…”

Section: Conceptual Designmentioning

confidence: 99%

6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

2012

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“…Además, se han popularizado por las diversas aplicaciones que tienen, tales como: cojinetes magnéticos (Chen, 2010) y (Du, 2010); sistemas para trenes de levitación magnética (Hasirci, 2011); aislamiento de vibraciones (Tsuda, 2009); microrobots magnéticos (Kummer, 2010); máquinas eléctricas (Arrendondo, 2008); sistema de transportación magnética (Wai, 2011); sistemas de posicionamiento nanométrico (Kim, 2007), entre muchas otras (Peijnenburg, 2006), (Kimman, 2010), (Lee, 2006). El sistema de levitación propuesto en este trabajo consiste en una viga con libertad para rotar, la cual es estabilizada mediante un electroimán colocado en uno de los extremos.…”

Section: Introductionunclassified

Modelado y control de un sistema de levitación magnética basado en un cojinete magnético activo

Cruz-Pegueros

Frías

Lozada‐Castillo

et al. 2017

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En este trabajo se presenta el diseño, modelado e implementación de un sistema de levitación magnética de un grado de libertad, que consiste en una viga actuada por un cojinete magnético activo en configuración pendular. Se obtiene su representación en espacio de estado y, tras una linealización tangente, su función de transferencia correspondiente. Se describen las características del dispositivo experimental, su instrumentación electrónica y mecanismo, particularmente el procedimiento de diseño del actuador electromagnético empleado, así como su caracterización para determinar la constante de proporcionalidad de la fuerza electromagnética. Finalmente, se muestra la simulación numérica e implementación experimental de esquemas clásicos de control para estabilizar en el punto de equilibrio del sistema.

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“…In these reports, the maglev positioning stages are proved to be excellent in positioning accuracy and respond speed, but the small travel range is a shortcoming. Enlarging the stroke of actuator is effective to solve this issue [11][12][13], but the system will suffer from three challenges: actuator, many researchers use the advanced control method [16,17]. Thirdly, to eliminate the strong coupling between each actuator, the wrench-current transforming matrix is constructed to decouple each actuating unit [18].…”

Section: Introductionmentioning

confidence: 99%

Prototype of 6-DOF Magnetically Levitated Stage Based on Single Axis Lorentz force Actuator

Xu¹,

Xu²,

Chen³

2016

Journal of Electrical Engineering and Technology

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-We present a prototype of 6-DOF magnetically levitated stage based on single axis Lorentz force actuator is capable of positioning down to micron in several millimeter travel range with a simple and compact structure. The implementation of the Lorentz force actuators, instrument modeling, and motion controller of the maglev system are described. With the force-gap relationship of the actuator solved by Gaussian quadrature, 2-demsional (2D) lookup table is employed to store the result for the designing of control system. Based on the force-gap relationship, we choose the suitable stroke of each actuator to develop the stability of the maglev stage. Complete decoupling matrix is analyzed here to establish a decoupled dynamics between resulting six axis motion and eight outputs to the actuators. The design travel volume of the stage is 2mm×2mm×2mm in translation and 80mrad× 80mrad×40mrad in rotation. With a constant gain and critical damping PID controller, the resolution of the translation is 2.8um and 4um root mean square in horizontal and vertical direction respectively. Experimental results are presented to illustrate the positioning fluctuations, step responds and multi axis motion. Some comparative tests are taken to highlight the advantage resulted from the accurate force-gap relationship, suitable stroke, and complete decoupling matrix.

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Design and precision construction of novel magnetic-levitation-based multi-axis nanoscale positioning systems

Cited by 84 publications

References 13 publications

6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

6-DoF miniature maglev positioning stage for application in haptic micro-manipulation

Modelado y control de un sistema de levitación magnética basado en un cojinete magnético activo

Prototype of 6-DOF Magnetically Levitated Stage Based on Single Axis Lorentz force Actuator

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