Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter

Luo, Tiancheng; Liu, Yan; Zou, Yang; Zhou, Jie; Liu, Wenjuan; Wu, Guoqiang; Cai, Yao; Sun, Chengliang

doi:10.3390/mi13010087

Cited by 8 publications

(6 citation statements)

References 33 publications

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“…The phase velocity of the lowerorder symmetric Lamb wave mode is up to 10,000 m/s [126]. However, there are some parameters that still need optimization to further reduce the noise in the designed sensors and filters and produce low-lose filters and stable oscillators [133][134][135]. In addition, the fabrication of these types of resonators is considered not compatible with some common multiuser fabrication technology which is considered one of the obstacles for us to use it in our research.…”

Section: Lateral Extensional Mode (Le) Contour-mode or Lamb Wave Modementioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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Section: Lateral Extensional Mode (Le) Contour-mode or Lamb Wave Modementioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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“…It was demonstrated that the AlN/Al x Sc 1−x N composite films effectively reduced the surface roughness, abnormal grains in films, and mechanical stress, which indicated an effective improvement in film quality. Luo et al [113] designed and simulated a dual-mode Al 0.8 Sc 0.2 N Lamb wave resonator. Different from the two IDT arrays with equal thicknesses in conventional Lamb wave resonators, two IDT arrays with different thicknesses were applied as the top electrode.…”

Section: S0 Mode Alxsc 1−x N-based Lamb Wave Resonatorsmentioning

confidence: 99%

Micromachined piezoelectric Lamb wave resonators: a review

Lu,

Ren

2023

J. Micromech. Microeng.

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With the development of next-generation wireless communication and sensing technologies, there is an increasing demand for high-performance and miniaturized resonators. Micromachined piezoelectric Lamb wave resonators are becoming promising candidates because of their multiple vibration modes, lithographically defined frequencies, and small footprint. In the past two decades, micromachined piezoelectric Lamb wave resonators based on various piezoelectric materials and structures have achieved considerable progress in performance and applications. This review focuses on the state-of-the-art Lamb wave resonators based on aluminum nitride (AlN), aluminum scandium nitride (AlxSc1-xN), and lithium niobate (LiNbO3), as well as their applications and further developments. The promises and challenges of micromachined piezoelectric Lamb wave resonators are also discussed. It is promising for micromachined piezoelectric Lamb wave resonators to achieve higher resonant frequencies and performance through advanced fabrication technologies and new structures, the integration of multifrequency devices with radio frequency (RF) electronics as well as new applications through utilizing nonlinearity and spurious modes. However, several challenges, including degenerated electrical and thermal properties of nanometer-scale electrodes, accurate control of film thickness, high thin film stress, and a trade-off between electromechanical coupling efficiencies and resonant frequencies, may limit the commercialization of micromachined piezoelectric Lamb wave resonators and thus need further investigation. Potential mitigations to these challenges are also discussed in detail in this review. Through further painstaking research and development, micromachined piezoelectric Lamb wave resonators may become one of the strongest candidates in the commercial market of RF and sensing applications.

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“…The FBAR is composed of an AlN film with a c -axis-tilted angle, which leads to the coexistence of a longitudinal mode and a shear mode. Luo et al [ 14 ] and Yang et al [ 15 ] both proposed dual-band filters based on the modified lamb wave resonator (LWR), as the former one utilized two interdigital electrode (IDT) arrays with different thicknesses, and the latter one exploited the LN thickness difference. Dual-band surface acoustic wave (SAW) filters have been researched as well.…”

Section: Introductionmentioning

confidence: 99%

Dual-Passband SAW Filter Based on a 32°YX-LN/SiO2/SiC Multilayered Substrate

et al. 2023

Micromachines

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To meet the demands of highly integrated and miniaturized radio frequency front-end (RFFE) modules, multi-passband filters which support multi-channel compounding come to the foreground. In this work, we proposed a new design of a dual-passband surface acoustic wave (SAW) filter based on a 32°YX-LiNbO3 (LN)/SiO2/SiC multilayered structure. The filter is of a standalone ladder topology and comprises dual-mode resonators, in which the shear horizontal (SH) mode and high-order SH mode are simultaneously excited through electrode thickness modulation. The impact of electrode thickness on the performance of the dual-mode resonator was systematically investigated by the finite element method (FEM), and resonators were prepared and verified the simulation results. The electromechanical coupling coefficients (K2) of the SH modes are 15.1% and 17.0%, while the maximum Bode-Q (Qmax) values are 150 and 247, respectively, for the fabricated resonators with wavelengths of 1 μm and 1.1 μm. In terms of the high-order SH modes in these resonators, the K2 values are 9.8% and 8.4%, and Qmax values are 190 and 262, respectively. The fabricated dual-band filter shows the center frequencies (fc) of 3065 MHz and 4808 MHz as two bands, with 3-dB fractional bandwidths (FBW) of 5.1% and 5.9%, respectively. Such a dual-band SAW filter based on a conventional ladder topology is meaningful in terms of its compact layout and diminished area occupancy. This work provides a promising avenue to constitute a high-performance dual-passband SAW filter for sub-6 GHz RF application.

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Design and Optimization of the Dual-Mode Lamb Wave Resonator and Dual-Passband Filter

Cited by 8 publications

References 33 publications

A review of piezoelectric MEMS sensors and actuators for gas detection application

A review of piezoelectric MEMS sensors and actuators for gas detection application

Micromachined piezoelectric Lamb wave resonators: a review

Dual-Passband SAW Filter Based on a 32°YX-LN/SiO2/SiC Multilayered Substrate

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