2009
DOI: 10.1016/j.snb.2009.09.004
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Design and optimization of an ultra thin flexible capacitive humidity sensor

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Cited by 95 publications
(51 citation statements)
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“…Temperature sensitivity compares well with the literature, with reported values ranging from 0.0018/°C up to 0.0061/°C. 24 Likewise, humidity sensor displays high sensitivity compared to flexible polyimide-based humidity sensors, with reported sensitivities as low as 0.0038/% RH 25 and 0.0025/%RH. 16 Generally, higher sensitivities can be achieved by optimizing the dimensions of the interdigitated electrodes, such as width, length, and separation between the fingers, as described in the following work.…”
Section: Performance Of the Sensorsmentioning
confidence: 99%
“…Temperature sensitivity compares well with the literature, with reported values ranging from 0.0018/°C up to 0.0061/°C. 24 Likewise, humidity sensor displays high sensitivity compared to flexible polyimide-based humidity sensors, with reported sensitivities as low as 0.0038/% RH 25 and 0.0025/%RH. 16 Generally, higher sensitivities can be achieved by optimizing the dimensions of the interdigitated electrodes, such as width, length, and separation between the fingers, as described in the following work.…”
Section: Performance Of the Sensorsmentioning
confidence: 99%
“…Two types of humidity sensors that provide high flexibility and good sensitivity have been studied using organic polymers [1], polymer mixtures [2], and polymer/nanoparticle composites [3]. Capacitive humidity sensors detect humidity based on the capacitance change between two detection electrodes.…”
Section: Introductionmentioning
confidence: 99%
“…To allow the analytes diffusion into the dielectric material, top electrode must be shaped with some openings: in particular, the simulations have shown that the square pattern for the top electrode is the best choice, as well described in our previous works [24]. The top electrode of the capacitor has been chosen with an area of about 1.5 mm × 1.5 mm and a transparency factor of 50%.…”
Section: Sensors Units Designmentioning
confidence: 98%
“…As reported in several papers, the feasibility and the efficiency of both methods to develop flexible capacitive sensors have been demonstrated [15][16][17][18]. The second strategy, unlike the first [19][20][21][22][23], allows to use thick layer of CIM with thin layers of metal electrodes without altering system flexibility and sensor functioning, as reported in our previous paper [24]. For these reasons, we adopted this strategy to develop the SS, fabricating the capacitive flexible sensor with two metal layers (top and bottom), where the top electrode is patterned in squares in order to allow the analytes diffusion into the CIM.…”
Section: Introductionmentioning
confidence: 94%