Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide

Abstract

We present the design and experimental demonstration of the ultra-high-Q-factor silicon microring resonator based on a multi-mode ridge waveguide. The multi-mode ridge waveguide is designed to decrease the propagation loss and to improve the Q factor. The ultra-high Q factor of 1.1×10 is experimentally demonstrated, with the free spectrum range of 0.208 nm. The single-mode ridge waveguide is used in the coupling region to reduce the dimension of the microring resonator, and the bend radius is only 20 μm. To precisely control the resonance wavelength, a small heater is implemented on the silicon microring resonator with the tuning efficiency of 7.1 pm/mW. The degenerate four-wave mixing of the silicon microring resonator is investigated, and the conversion efficiency is measured to be -15.5 dB without optimizing the dispersion of the microring resonator and carriers extraction.

Field-programmable silicon temporal cloak

“…Fourth, a wave shaper is used to tailor the spectral shaper of optical frequency comb source, at the cost of high loss of optical link. A possible solution is to adopt a thermally tuned microring resonator (TT-MRR) with a moderate modulated rate 41–43 . TT-MRR can offer a constant transmission as a swept-frequency filter, and a more linear frequency chirp for the time lens, compared to ET-MRR.…”

Raman Lasing in Multimode Silicon Racetrack Resonators

“…[ 28,29 ] In a multimode racetrack resonator, the low optical overlap between the fundamental mode and the sidewalls reduces the loss of the fundamental mode and enables the cavity with a Q of 1.1 million for enhanced four‐wave mixing. [ 30 ] Ultralow‐loss multimode silicon nitride resonators with intrinsic Qs of 37 million were proposed and used in parametric oscillation with sub‐milliwatt pump powers. [ 31 ] A multimode silicon waveguide was numerically proposed to provide wideband multimode four‐wave mixing.…”

“…We used a multimode waveguide, in which the optical mode interacting with the sidewalls of the waveguide is decreased, to achieve low scattering loss from the waveguide sidewalls and attain a high Q. [ 30,35 ] In our recent conference article, we reported the initial observation of Raman lasing at 1440 nm Stokes wavelength pumped with a 1340 nm wavelength in a high‐Q (>10 6 ) multimode racetrack resonator with 0.4 mW lasing threshold power and a 25 V reverse bias. [ 36 ] In this article, at 1340 nm pump wavelength, we experimentally show that Raman lasing can occur without any reverse bias in the multimode racetrack resonator.…”

1.4 million Q factor Si3N4 micro-ring resonator at 780 nm wavelength for chip-scale atomic systems

“…Most high-Q factor micro-rings to date have been designed and demonstrated at telecoms wavelengths especially around 1550 nm where narrow linewidth lasers are mature and readily available. Silicon photonic devices have been pushed to Q factors as high as 1.1 × 10 6 [7]. Higher Q factors have been demonstrated from a range of lower refractive index materials where the losses can be reduced significantly such as silicon nitride where Q factors are now 6.7 × 10 7 [8] for large modal overlapping waveguides and 8.1 × 10 7 for low modal overlaps with waveguides [9].…”