Design and Analysis of a Capacitive MEMS Accelerometer as a Wearable Sensor in Identifying Low-Frequency Vibration Profiles

Preeti, M.; Guha, Koushik; Baishnab, Krishna Lal; Sastry, Ananth

doi:10.1007/978-981-15-9612-4_2

Cited by 9 publications

(5 citation statements)

References 21 publications

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“…Technology related to material science, design optimization, and packaging is propelling MEMS technology into new domains. MEMS devices will keep having an impact on a wide range of industries and uses [1][2][3][4][5][6]. In MEMS dynamics, pull-in instability and periodic behavior are well-represented by differential equations.…”

Section: Introductionmentioning

confidence: 99%

The Homotopy Perturbation Method for Electrically Actuated Microbeams in Mems Systems Subjected to Van Der Waals Force and Multiwalled Carbon Nanotubes

Amir,

Haider,

Ashraf

2024

Acta Mechanica Et Automatica

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This paper presents a summary of a study that uses the Aboodh transformation and homotopy perturbation approach to analyze the behavior of electrically actuated microbeams in microelectromechanical systems that incorporate multiwalled carbon nanotubes and are subjected to the van der Waals force. All of the equations were transformed into linear form using the HPM approach. Electrically operated microbeams, a popular structure in MEMS, are the subject of this work. Because of their interaction with a nearby surface, these microbeams are sensitive to a variety of forces, such as the van der Waals force and body forces. MWCNTs are also incorporated into the MEMSs in this study because of their special mechanical, thermal, and electrical characteristics. The suggested method uses the HPM to model how electrically activated microbeams behave when MWCNTs and the van der Waals force are present. The nonlinear equations controlling the dynamics of the system can be roughly solved thanks to the HPM. The HPM offers a precise and effective way to analyze the microbeam’s reaction to these outside stimuli by converting the nonlinear equations into linear forms. The study’s findings shed important light on how electrically activated microbeams behave in MEMSs. A more thorough examination of the system’s performance is made possible with the addition of MWCNTs and the van der Waals force. With its ability to approximate solutions and characterize system behavior, the HPM is a potent instrument that improves comprehension of the physics at play and facilitates the design and optimization of MEMS devices. The aforementioned method’s accuracy is verified by comparing it with published data that directly aligns with Anjum et al.’s findings. We have faith in this method’s accuracy and its current application.

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Section: Introductionmentioning

confidence: 99%

The Homotopy Perturbation Method for Electrically Actuated Microbeams in Mems Systems Subjected to Van Der Waals Force and Multiwalled Carbon Nanotubes

Amir,

Haider,

Ashraf

2024

Acta Mechanica Et Automatica

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“…Microelectromechanical system (MEMS) accelerometers are the crucial inertial sensors that find extensive applications in fields such as inertial navigation [ 1 , 2 , 3 , 4 ], vibration measurement [ 5 , 6 , 7 ], medical diagnosis [ 8 , 9 , 10 ], health monitoring [ 11 , 12 , 13 ], and disaster warning [ 14 , 15 , 16 ]. Presently, there is a growing demand for MEMS accelerometers with small sizes, high sensitivity, and superior stability [ 17 ].…”

Section: Introductionmentioning

confidence: 99%

“…Presently, there is a growing demand for MEMS accelerometers with small sizes, high sensitivity, and superior stability [ 17 ]. MEMS accelerometers can be classified based on their principles of operation, including capacitive [ 9 , 18 ], piezoresistive, resonant [ 19 , 20 ], and piezoelectric types [ 21 , 22 , 23 , 24 ]. Piezoelectric MEMS accelerometers exhibit several advantages over other types, including a wider operating frequency range, along with low power consumption, low-temperature dependence, and high sensitivity [ 25 , 26 ].…”

Section: Introductionmentioning

confidence: 99%

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Zhang

et al. 2023

Micromachines

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In this paper, a high-sensitivity microelectromechanical system (MEMS) piezoelectric accelerometer based on a Scandium-doped Aluminum Nitride (ScAlN) thin film is proposed. The primary structure of this accelerometer is a silicon proof mass fixed by four piezoelectric cantilever beams. In order to enhance the sensitivity of the accelerometer, the Sc0.2Al0.8N piezoelectric film is used in the device. The transverse piezoelectric coefficient d31 of the Sc0.2Al0.8N piezoelectric film is measured by the cantilever beam method and found to be −4.7661 pC/N, which is approximately two to three times greater than that of a pure AlN film. To further enhance the sensitivity of the accelerometer, the top electrodes are divided into inner and outer electrodes; then, the four piezoelectric cantilever beams can achieve a series connection by these inner and outer electrodes. Subsequently, theoretical and finite element models are established to analyze the effectiveness of the above structure. After fabricating the device, the measurement results demonstrate that the resonant frequency of the device is 7.24 kHz and the operating frequency is 56 Hz to 2360 Hz. At a frequency of 480 Hz, the sensitivity, minimum detectable acceleration, and resolution of the device are 2.448 mV/g, 1 mg, and 1 mg, respectively. The linearity of the accelerometer is good for accelerations less than 2 g. The proposed piezoelectric MEMS accelerometer has demonstrated high sensitivity and linearity, making it suitable for accurately detecting low-frequency vibrations.

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“…Due to the technologies used in the manufacture of microelectronics, the size of the sensors can be reduced to a match head, but the accuracy and mechanical strength, in most cases, will decrease. The last two parameters, considered to be disadvantages, are not decisive in the consumer segment, which allowed MEMS to become widespread in medicine [ 1 ], sports [ 2 ], the gaming industry [ 3 ] and especially in portable technology [ 4 , 5 , 6 ].…”

Section: Introductionmentioning

confidence: 99%

Topological Optimization of Circular SAW Resonators: Overcoming the Discreteness Effects

Shevchenko¹,

Mikhailenko²

2022

Sensors

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Recently, we proposed a ring-shaped surface acoustic wave (SAW) resonator sensitive element design, as well as analyzed its characteristics and suggested its optimization strategy, with major focus on their temperature stability. Here, we focus on further optimization of the design to narrow the bandwidth and improve signal detection, while taking into account typical technological limitations. Additionally, the purpose of design optimization and modeling is to check the preservation of operability in the case of lithography defects, which is the most common technological error. For that, we suggest structural alteration of the interdigital transducer (IDT) that leads to its partial fragmentation. Using COMSOL Multiphysics computer simulations, we validate several IDT options and show explicitly how it could be optimized by changing its pin geometry. Based on the results of the study, prototyping and printing of ring resonators on a substrate using photolithography will be carried out.

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Design and Analysis of a Capacitive MEMS Accelerometer as a Wearable Sensor in Identifying Low-Frequency Vibration Profiles

Cited by 9 publications

References 21 publications

The Homotopy Perturbation Method for Electrically Actuated Microbeams in Mems Systems Subjected to Van Der Waals Force and Multiwalled Carbon Nanotubes

The Homotopy Perturbation Method for Electrically Actuated Microbeams in Mems Systems Subjected to Van Der Waals Force and Multiwalled Carbon Nanotubes

A High-Sensitivity MEMS Accelerometer Using a Sc0.8Al0.2N-Based Four Beam Structure

Topological Optimization of Circular SAW Resonators: Overcoming the Discreteness Effects

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