Deposition and Performance Challenges of Transparent Conductive Oxides on Plastic Substrates

Bright, Clark I.

doi:10.1002/9780470710609.ch5

Cited by 8 publications

(7 citation statements)

References 49 publications

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“…Transparent conductive oxides (TCO) and Transparent semiconductive oxides (TSO) are the main investigated materials to attain such devices [69]. Indium tin oxide (ITO), or tin doped indium oxide, is one of the most well-known transparent, conductive materials, where the conduction mechanism is scientifically interesting and this oxide has been widely used for a variety of applications (photovoltaics, biomedical devices) over other transparent conductors [111], [112].…”

Section: Itomentioning

confidence: 99%

“…Several other materials such as Indium (III) oxide (In2O3), Tin (IV) oxide (SnO2), and Zinc oxide (ZnO) can fulfil these needs but in their undoped stoichiometric state, these oxides are insulators. Substitutional doping (n-type) and oxygen vacancies play important roles in the conductivity of such oxides [111]. In an n-type TCO, lattice defects in the crystal, substitutional defects, and oxygen vacancies can create excess of electrons.…”

Section: Itomentioning

confidence: 99%

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Hybrid Materials for Wearable Electronics and Electrochemical Systems

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2022

Linköping Studies in Science and Technology. Dissertations

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I would like to thank TPE members (Marzieh, Robert, Hongli, Patrik, Makara, Neha, Kristin, Desalegn) for all the scientific work, gatherings, and Friday morning meetings. Thank you Patrik for all Swedish speaking club and lunchmöte sessions.Many thanks to Electrochemistry team (Mikhail, Viktor, Zia, Zia 2.0, Ujwala, Fareed, Kosala, Valerio and Xavier) for always reminding me that I know nothing about the things going on at the electrode processes. IXBig thanks to my close colleagues. Ludovico for all the fun and full of music loaded time in cleanroom and dinners. Igor for all the boring physics related discussions and cooking sessions. Enjoyed your company while discussing history and politics. Marie for recipes, fun time in lab and motivation boosters. Maciej for finding all the smartest but cheapest solutions. Andrea for all the electrical engineering know-how share, lab hacks and his years long friendship. Zia for all the quick scientific discussions, sharing goodwill activities and grant writing tips. Donghak for answering my shocking questions during our lithography meetings. Rob for all the sarcasm during the PEA experiments. Gabor for Japanese lifestyle lessons, life hacks in Japan and crazy ideas (experimental). Calvin for all the fun/lab time in Hamburg and also in KTH. It was a great experience to learn with you, really hoping to see you in science business.

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Section: Itomentioning

confidence: 99%

Section: Itomentioning

confidence: 99%

Hybrid Materials for Wearable Electronics and Electrochemical Systems

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2022

Linköping Studies in Science and Technology. Dissertations

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“…Experimental data show that this limit is now regularly approached [ 16 , 17 ]. The transparency specification results in an absolute limit to the conductivity of 2.5 × 10 4 Ω –1 ·cm –1 [ 18 , 19 , 20 ].…”

Section: Introductionmentioning

confidence: 99%

Transparent Conducting Amorphous IZO Thin Films: An Approach to Improve the Transparent Electrode Quality

et al. 2023

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It is common knowledge that using different oxygen contents in the working gas during sputtering deposition results in fabrication of indium zinc oxide (IZO) films with a wide range of optoelectronic properties. It is also important that high deposition temperature is not required to achieve excellent transparent electrode quality in the IZO films. Modulation of the oxygen content in the working gas during RF sputtering of IZO ceramic targets was used to deposit IZO-based multilayers in which the ultrathin IZO unit layers with high electron mobility (μ-IZO) alternate with ones characterized by high concentration of free electrons (n-IZO). As a result of optimizing the thicknesses of each type of unit layer, low-temperature 400 nm thick IZO multilayers with excellent transparent electrode quality, indicated by the low sheet resistance (R ≤ 8 Ω/sq.) with high transmittance in the visible range (T¯ > 83%) and a very flat multilayer surface, were obtained.

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“…Sn is the most-used dopant in In 2 O 3, as 60% of transparent conductors in the market are based on indium-tin oxide (ITO) [6,25,28,29]. In ITO, Sn 4+ substitutes In 3+ in the indium oxide crystal structure, resulting in the donation of one free electron [5,14,29,30]. Therefore, high densities of Sn are necessary in order to achieve high carrier concentrations.…”

Section: Introductionmentioning

confidence: 99%

Solution Combustion Synthesis of Hafnium-Doped Indium Oxide Thin Films for Transparent Conductors

et al. 2022

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Indium oxide (In2O3)-based transparent conducting oxides (TCOs) have been widely used and studied for a variety of applications, such as optoelectronic devices. However, some of the more promising dopants (zirconium, hafnium, and tantalum) for this oxide have not received much attention, as studies have mainly focused on tin and zinc, and even fewer have been explored by solution processes. This work focuses on developing solution-combustion-processed hafnium (Hf)-doped In2O3 thin films and evaluating different annealing parameters on TCO’s properties using a low environmental impact solvent. Optimized TCOs were achieved for 0.5 M% Hf-doped In2O3 when produced at 400 °C, showing high transparency in the visible range of the spectrum, a bulk resistivity of 5.73 × 10−2 Ω.cm, a mobility of 6.65 cm2/V.s, and a carrier concentration of 1.72 × 1019 cm−3. Then, these results were improved by using rapid thermal annealing (RTA) for 10 min at 600 °C, reaching a bulk resistivity of 3.95 × 10 −3 Ω.cm, a mobility of 21 cm2/V.s, and a carrier concentration of 7.98 × 1019 cm−3, in air. The present work brings solution-based TCOs a step closer to low-cost optoelectronic applications.

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Deposition and Performance Challenges of Transparent Conductive Oxides on Plastic Substrates

Cited by 8 publications

References 49 publications

Hybrid Materials for Wearable Electronics and Electrochemical Systems

Hybrid Materials for Wearable Electronics and Electrochemical Systems

Transparent Conducting Amorphous IZO Thin Films: An Approach to Improve the Transparent Electrode Quality

Solution Combustion Synthesis of Hafnium-Doped Indium Oxide Thin Films for Transparent Conductors

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