2021
DOI: 10.1016/j.ultramic.2021.113368
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Demonstration of atomic force microscopy imaging using an integrated opto-electro-mechanical transducer

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Cited by 3 publications
(2 citation statements)
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“…High-speed scanning AFM reduces testing time through enhanced scanning speed (Liao et al, 2022). The miniaturized and integrated sensing mechanism of the AFM parallel scanning probe system enables simultaneous operation of multiple probes for image acquisition (Galeotti et al, 2021). Additionally, a fully automated multi-sample analysis concept facilitates the study of samples in fluids and biological cells by increasing the number of scanned samples (Dujardin et al, 2019).…”
Section: Discussion and Prospectmentioning
confidence: 99%
“…High-speed scanning AFM reduces testing time through enhanced scanning speed (Liao et al, 2022). The miniaturized and integrated sensing mechanism of the AFM parallel scanning probe system enables simultaneous operation of multiple probes for image acquisition (Galeotti et al, 2021). Additionally, a fully automated multi-sample analysis concept facilitates the study of samples in fluids and biological cells by increasing the number of scanned samples (Dujardin et al, 2019).…”
Section: Discussion and Prospectmentioning
confidence: 99%
“…They are mainly focused on sensing displacement, mass [10], or force [11] as a consequence of the target phenomena such as molecular bindings, mechanical vibrations, or external stress. As an example, MOEMS and NOEMS are present in devices such as atomic force microscopes [12], accelerometers [13], or biosensors [14]. Current trends show that optical solutions provide a better performance in terms of sensitivity, resolution, and power consumption compared to other sensing methods (e.g., piezoelectric or capacitive) [15].…”
Section: Introductionmentioning
confidence: 99%