2010
DOI: 10.1007/s11666-010-9469-0
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Cubic Aluminum Nitride Coating Through Atmospheric Reactive Plasma Nitriding

Abstract: Aluminum nitride is a promising material for structural and functional applications. Cubic AlN (c-AlN) is expected to have higher thermal conductivity due to their high symmetry; however, its fabrication is difficult. In this study, c-AlN was synthesized by atmospheric plasma spray process through the reaction between Al feedstock powder and nitrogen plasma. Al powders were supplied to the plasma stream by Ar carrier gas and reacted with surrounding N 2 plasma, then deposit onto substrate. The obtained coating… Show more

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Cited by 30 publications
(19 citation statements)
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“…Furthermore, a new c-AlN phase (Zinc-blend phase) was detected in the XRD spectra after using the AlN additive. The zinc-blend phase did not appear during the reactive plasma nitriding of only Al powder as shown in our previous studies [15][16][17][18] and in Figure 2. Some oxides like aluminum oxynitrides (Al 5 O 6 N) and Al 2 O 3 (which appeared during the nitriding of Al powder) were detected in the XRD spectra.…”
Section: Spraying Of Wet-mixed Al/aln Powderssupporting
confidence: 61%
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“…Furthermore, a new c-AlN phase (Zinc-blend phase) was detected in the XRD spectra after using the AlN additive. The zinc-blend phase did not appear during the reactive plasma nitriding of only Al powder as shown in our previous studies [15][16][17][18] and in Figure 2. Some oxides like aluminum oxynitrides (Al 5 O 6 N) and Al 2 O 3 (which appeared during the nitriding of Al powder) were detected in the XRD spectra.…”
Section: Spraying Of Wet-mixed Al/aln Powderssupporting
confidence: 61%
“…The nitrogen reacts intensely with the liquid metallic particles and the nitriding reaction occurs via three steps as clarified in more detail in our previous studies [17,18]: nitridation at the surface of the particles with the formation of a crystalline AlN shell, breakaway or outflow of molten or vaporized Al core, and volume nitridation outside the shell with a remaining hole or an empty core. Thus, under high-temperature conditions, above the Al melting point (660 °C), Al particles melt, followed by coalescence into a ball-like form due to surface tension.…”
Section: Discussionmentioning
confidence: 94%
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“…Reactive thermal spraying is an effective way to prepare in situ composite coatings with good toughness and wear resistance (Ref [3][4][5]. During reactive spraying, hard ceramic phases (such as oxides, carbides, nitrides, and borides) can be formed in situ by the reactions between feedstock materials or between feedstock materials and surrounding reactive gases (Ref [6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…However, the synthesis of c-AlN is more tricky than α-AlN 11,12 . Owing to fabrication difficulties of such films and experimental verifications, applications to industrial devices have poorly been implemented yet.…”
mentioning
confidence: 99%