Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics

Korytár, D.; Zápražný, Zdenko; Ferrari, C.; Frigeri, C.; Jergel, M.; Maťko, I.; Kečkéš, Jozef

doi:10.1364/ao.57.001940

Cited by 13 publications

(8 citation statements)

References 10 publications

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“…Nanoindentation determines hardness and Young's modulus of a material through load-displacement behavior of the material tested with a Berkovich indenter. It has been shown in previous study [1] that nanoindentation responses are very sensitive to near-surface material damage. Hardness and Young's modulus are extracted using Oliver & Pharr method using Eq.…”

Section: Nanoindentation Array Testsmentioning

confidence: 80%

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Subsurface damage assessment of femtosecond laser-processed surfaces

Xu,

Chen,

Qiao

et al. 2023

Optifab 2023

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Section: Nanoindentation Array Testsmentioning

confidence: 80%

Section: Introduction 11 Subsurface Damagementioning

confidence: 99%

Subsurface damage assessment of femtosecond laser-processed surfaces

Xu,

Chen,

Qiao

et al. 2023

Optifab 2023

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“…Components of subsurface damage include median (propagating downwardly in the loading direction) and lateral (extending upwardly in parallel to the surface) cracks, dislocations, residual stresses, etc. [1] Figure 1 shows schematically the subsurface damage structure in optical glass in a cross-sectional view. Subsurface damage is in almost all cases unwanted in finished surfaces because it can be the source of component responsible for low mechanical or optical performance.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, it is crucial to precisely determine SSD and possibly reduce or mitigate it by a finishing process. Developed approaches for evaluating SSD include destructive (also known as invasive) and non-destructive ones [1].…”

Section: Introductionmentioning

confidence: 99%

Assessment of sub-micron subsurface damage in glass

Xu¹,

Chen²,

Qiao³

et al. 2023

Appl. Opt.

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We present a new experimental method for assessing sub-micron level subsurface damage (SSD) on optical glass. The method correlates surface characteristics such as fracture toughness and Young's modulus via nanoindentation with penetration depth into the tested surfaces, at different overall penetration depths as revealed by magnetorheological finishing (MRF) spotting techniques. Our results on ground surfaces suggest that low surface roughness does not necessarily imply the absence of SSD. We also compared SSD on surfaces processed by deterministic microgrinding and femtosecond (fs) laser polishing. The fs-laser polished surfaces revealed no detectable SSD, thus establishing the feasibility of fs-laser polishing for precision optical manufacturing.

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“…Compared with the traditional rigid polishing tool, the bonnet polishing tool is flexible and soft; thus, it leaves few scratches on the surface and reduces subsurface damage. 21 Due to the flexibility of the polishing tool, bonnet polishing has the superiority in adapting to different kinds of surfaces. During the bonnet polishing process, the polishing tool contacts the surface and deforms.…”

Section: Introductionmentioning

confidence: 99%

Polishing path generation for physical uniform coverage of the aspheric surface based on the Archimedes spiral in bonnet polishing

Zhao

Zhang

Han

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part B:

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As a new polishing method, bonnet polishing is suitable for polishing the curved surface due to its advantages in flexibility and adaptability of the polishing tool. In the polishing process, the contact state between the bonnet and the curved surface always changes. The traditional polishing tool path with equal interval will inevitably lead to over-polished areas and unpolished areas. In this article, a new tool path for bonnet polishing, which is called the revised Archimedes spiral polishing path, is proposed to ensure the physical uniform coverage of the curved surface in bonnet polishing. The path generation method is based on the modified tool–workpiece contact model and the pointwise searching algorithm. To prove the effectiveness of the revised path, two aspheric workpieces were polished along the traditional Archimedes spiral polishing path and the revised path, respectively. The roughnesses of the two workpieces are 10.94 and 10 nm, and the profile tolerances are 0.4097 and 0.2037 μm, respectively. The experimental results show that the revised path achieves lower roughness and surface tolerance than the traditional Archimedes path, which indicates that the revised path can achieve uniform physical coverage on the surface.

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Cross-sectional TEM study of subsurface damage in SPDT machining of germanium optics

Cited by 13 publications

References 10 publications

Subsurface damage assessment of femtosecond laser-processed surfaces

Subsurface damage assessment of femtosecond laser-processed surfaces

Assessment of sub-micron subsurface damage in glass

Polishing path generation for physical uniform coverage of the aspheric surface based on the Archimedes spiral in bonnet polishing

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