Abstract:Fused silica is an important optical material with important applications, where the surface must be precisely machined without subsurface damage. In this study, multi-cyclic indentations under incremental loads were performed on fused silica using two kinds of indenters to clarify the mechanisms of crack generation and propagation induced by precision grinding. It was found that incremental loading cyclic nanoindentation induced various patterns of subsurface cracking and surface spalling. Four kinds of surfa… Show more
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