2007
DOI: 10.1063/1.2785158
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Control of tip-to-sample distance in atomic force microscopy: A dual-actuator tip-motion control scheme

Abstract: The control of tip-to-sample distance in atomic force microscopy (AFM) is achieved through controlling the vertical tip position of the AFM cantilever. In the vertical tip-position control, the required z motion is commanded by laser reading of the vertical tip position in real time and might contain high frequency components depending on the lateral scanning rate and topographical variations of the sample. This paper presents a dual-actuator tip-motion control scheme that enables the AFM tip to track abrupt t… Show more

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Cited by 17 publications
(8 citation statements)
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“…These scanners are fast, but are typically limited in range, as they trade scan range for speed by decreasing the size of the actuators. More recently, feedback using two different Z-actuators has been shown to offer a promising increase in speed 24 25 . The tip and the sample are moved with different actuators, where one actuator is lower range but faster.…”
mentioning
confidence: 99%
“…These scanners are fast, but are typically limited in range, as they trade scan range for speed by decreasing the size of the actuators. More recently, feedback using two different Z-actuators has been shown to offer a promising increase in speed 24 25 . The tip and the sample are moved with different actuators, where one actuator is lower range but faster.…”
mentioning
confidence: 99%
“…Further improvement of the feedback can be reached by electronically damping the quality factor of the first eigenmode ͑Q control͒ and by different controller types such as field programmable gate arrays. 22 The measurement setup that we presented consists of two cantilevers, one serving as a force sensor, and the other as a displacement actuator. The separation of sensing and actuating gives a more direct insight into the dynamic variables but in principle it is possible to use the same cantilever for both.…”
Section: Discussionmentioning
confidence: 99%
“…Mechanical designs have included shear-mode actuators [33], balanced scanners [31], and flexure-based designs [15]. Another method for increasing the resonance frequency is to actuate the probes directly, this has been demonstrated with piezoelectric probes [41], magnetic probes [42], and electrostatic probes [43]. Although these specialized techniques can achieve high bandwidth, they may not be practical for general purpose applications.…”
Section: Article In Pressmentioning
confidence: 98%