2005
DOI: 10.1063/1.1901836
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Control of the Mg doping profile in III-N light-emitting diodes and its effect on the electroluminescence efficiency

Abstract: The influence of the Mg doping profile on the electroluminescence (EL) efficiency of (AlGaIn)N quantum well (QW) light-emitting diodes, grown by low-pressure metal-organic vapor-phase epitaxy on sapphire, has been investigated. The actual Mg profile close to the active region was found to be influenced by segregation as well as by diffusion during growth. In a first experiment, diffusion of the Mg dopants towards the QW region through a not intentionally doped narrow GaN spacer layer, separating the topmost Ga… Show more

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Cited by 69 publications
(34 citation statements)
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“…The exposure to high temperature can also induce modifications in the Mg profile, due to the diffusion of the acceptor atoms within the device structure. 4,5 For a careful optimization of the growth and processing conditions of GaN-based LEDs, it is important to understand how high temperatures can modify the internal structure of the devices, and in particular the distribution of structural defects such as dislocations, and the profile of the acceptor doping. Although relevant results have been described by the studies quoted above, no extensive analysis of the impact of high temperatures on the crystalline quality and on the Mg profile has been presented up to now.…”
mentioning
confidence: 99%
“…The exposure to high temperature can also induce modifications in the Mg profile, due to the diffusion of the acceptor atoms within the device structure. 4,5 For a careful optimization of the growth and processing conditions of GaN-based LEDs, it is important to understand how high temperatures can modify the internal structure of the devices, and in particular the distribution of structural defects such as dislocations, and the profile of the acceptor doping. Although relevant results have been described by the studies quoted above, no extensive analysis of the impact of high temperatures on the crystalline quality and on the Mg profile has been presented up to now.…”
mentioning
confidence: 99%
“…In addition to studying the piecewise homogeneous structures, we also compare them to structures where the GaN interlayer (thickness d i ) blocking Mg diffusion to the quantum well (QW) during growth [14] has been replaced by a 100 nm thick linearly graded In 7.5 Ga 92.5 N-GaN material layer where the n-type polarization doping [15] is fully neutralized by an equivalent p-type impurity doping. For simplicity, the AR consists of a single In 15 Ga 85 N QW in all the structures, the contact separation between the n-and p-type contacts is set to 1 µm and the total width of the n-contact fingers of the DHJ structures is 10% of the p-contact width d p .…”
mentioning
confidence: 99%
“…The TEM-WBDF images obtained using different g-vectors (<0002> and <11-20>) did not, however, show the presence of these dislocations. It has been shown using secondary ion mass spectrometry that Mg can diffuse during the growth of Mgdoped capping layers into the underlying active quantum well regions of light emitting diodes (LEDs) and laser diodes [9,10]. The presence of Mg in the active region has also recently been linked to the reduction of the electroluminescence intensity of LEDs [9], which was suggested to result from the formation of deep non-radiative recombination centers, such as Mg-nitrogen vacancy complexes [11].…”
Section: Resultsmentioning
confidence: 98%