Abstract:The in-depth profiles obtained from Auger electron spectroscopy or X-ray photoelectron spectroscopy (XPS) experiments are known to differ from an actual concentration profiles due to limitations of surface-sensitive techniques, e.g. finite sampling depth, or atomic mixing during sputtering. However, the monitored signal intensities are also affected by elastic scattering of signal electrons. Calculations performed for idealized multilayer structures indicate that elastic scattering of photoelectrons may signif… Show more
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