Computationally efficient model for viscous damping in perforated MEMS structures

Kaczynski, Jaroslaw; Ranacher, Christian; Fleury, Clément

doi:10.1016/j.sna.2020.112201

Cited by 10 publications

(4 citation statements)

References 7 publications

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“…In 2020, Kaczynski et al, developed an analytical model of the flow resistance for viscous air damping in a MEMS structure comprising a perforated plate in close proximity to a solid plate. The model covers an extended geometry range and the validity compared to previously reported models [23]. Consequently, a macro-model with the quantitative characterization of thermal characteristics and, thus, the reduced computational expense is necessary to enable fast simulation of the gas sensor.…”

Section: Introductionmentioning

confidence: 91%

“…The combination of the finite element analysis with multi-physics system simulation was successfully demonstrated by the example of a pressure sensor system [18]. However, although the engineering simulation software (e.g., ANSYS, CoventorWare, COMSOL) has coupled field analysis capabilities, both the complexity of the geometrical structure and the feasibility of the thermal parameters occasionally offer incorrect results and conclusions [18][19][20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

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A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor

Chen

2020

Symmetry

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When using a MEMS sensor to measure the vacuum of a medium, the transition flow between the viscous flow and molar flow is usually used to describe the gas convection due to the physical principle, which is difficult to study through analysis and simulation. In this study, the description of gas flow under different pressures in a CMOS-MEMS vacuum sensors has been incorporated into a new behavioral ANSYS model. The proposed model was built and the characteristic parameters in the model were obtained based on a CMOS-MEMS thermopile patterned with circular symmetry and an embedded heater as a heat source. It contains a characteristic length to describe the effective distance of heat dissipation to the silicon substrate, and the corresponding transition pressure to describe the symmetrical phenomenon of gas heat conduction. The macro-model is based on the description of the physical characteristics of heat transfer and the characteristic parameters of the CMOS-MEMS vacuum sensor. The characteristic length of 49 μm and the corresponding transition pressure of 2396 mTorr for the thermoelectric-type vacuum sensor were extracted and verified successfully. The results show that the average error for the prediction of vacuum sensing by the macro-model we proposed is about 1.11%. This approach provides more applications for vacuum analysis. It can reduce the complexity of simulation and analysis and provide better simulation effects, including gas conduction mechanisms.

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Section: Introductionmentioning

confidence: 91%

Section: Introductionmentioning

confidence: 99%

A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor

Chen

2020

Symmetry

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“…The capacitive switch insertion and the isolation properties truly depend on the switch capacitance ratio. The RF MEMS switch upstate and down state capacitance can be expresses as [16],…”

Section: Mathematical Analysismentioning

confidence: 99%

Damping analysis to improve the performance of shunt capacitive RF MEMS switch

Thalluri

Kumar

Sekhar³

et al. 2021

FACTA U EE

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This paper describes the significance of the iterative approach and the structure damping analysis which help to get better the performance and validation of shunt capacitive RF MEMS switch. The micro-cantilever based electrostatic ally actuated shunt capacitive RF MEMS switch is designed and after multiple iterations on cantilever structure a modification of the structure is obtained that requires low actuation voltage of 7.3 V for 3 ?m deformation. To validate the structure we have performed the damping analysis for each iteration. The low actuation voltage is a consequence of identifying the critical membrane thickness of 0.7 ?m, and incorporating two slots and holes into the membrane. The holes to the membrane help in stress distribution. We performed the Eigen frequency analysis of the membrane. The RF MEMS switch is micro machined on a CPW transmission line with Gap- Strip-Gap (G-S-G) of 85 ?m - 70 ?m - 85 ?m. The switch RF isolation properties are analyzed with high dielectric constant thin films i.e., AlN, GaAs, and HfO2. For all the dielectric thin films the RF MEMS switch shows a high isolation of -63.2 dB, but there is shift in the radio frequency. Because of presence of the holes in the membrane the switch exhibits a very low insertion loss of -0.12 dB.

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“…In 2020, an analytical model was established for the squeeze-film effect on the perforated plate structure, which had been widely used in MEMS sensors. Compared with the existing damping models, the model could be applicable to a wider geometry range [20].…”

Section: Introductionmentioning

confidence: 99%

Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air

Xin-min

Wei

2022

Materials

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In this study, we investigated the viscosity, squeeze-film damping, and a SiC-based capacitive micro-accelerometer in rarefied air. A specific expression for the effective viscosity coefficient of the air was derived, and when the air pressure drops from the standard atmospheric pressure, the viscosity of the air will decrease accordingly. Decreases in the air pressure and the viscosity of the air lead to the change in the squeeze-film air damping in the micro-accelerometer, and both the viscous damping force and the elastic damping force of the air film between the moving electrode plate and the fixed electrode plate will also decrease. The damping coefficient and relative damping ratio of the micro-accelerometer in rarefied air were calculated, which was also confirmed by simulations. The changes of the damping coefficient and the relative damping ratio of the system will directly affect the dynamic characteristics of the micro-accelerometer. When the air pressure in the working environment is below the standard atmospheric pressure, the micro-accelerometer will be in an underdamping state. With the decrease in the air pressure, the working bandwidth of the micro-accelerometer will decrease significantly, and the resonant phenomenon may appear. However, the decrease in the air pressure will not have a notable impact on the response time of the micro-accelerometer. Therefore, this work provides a theoretical basis for the study of the performance characteristics of a SiC-based capacitive accelerometer in rarefied air.

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Computationally efficient model for viscous damping in perforated MEMS structures

Cited by 10 publications

References 7 publications

A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor

A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor

Damping analysis to improve the performance of shunt capacitive RF MEMS switch

Study on the Dynamic Characteristics of a SiC-Based Capacitive Micro-Accelerometer in Rarefied Air

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