“…2,6,11,12) While various processing techniques such as evaporation, metal-organic chemical vapor deposition, molecular beam epitaxy, and electrodeposition can be used for thermoelectric thin-film fabrication, electrodeposition is attractive because it is a rapid and low-cost method as well as a low-temperature process. 2,5,6,[12][13][14][15][16] While various works were carried out for thermopile sensors of cross-plane configuration, 6,[17][18][19] a thermopile sensor of in-plane configuration has its advantage in fabrication because of easy formation of in-plane thin-film legs by using electrodeposition. In this study, the n-type bismuth telluride (Bi-Te) and the p-type antimony telluride (Sb-Te) thin films were electrodeposited to fabricate thermopile sensors composed of the Bi-Te and the Sb-Te thinfilm legs.…”