Light trapping is a crucial technique for increasing the photocurrent of solar cells, particularly that of microcrystalline (μc‐Si) thin‐film solar cells. Transparent conductive oxides with rough surfaces such as Al‐doped ZnO (AZO) have been used extensively for this purpose. In general, the surface morphology influences the film growth and photovoltaic performance; on extremely rough surfaces the photovoltaic performance deteriorates. In this article, the experimental results of photoacoustic (PA) spectroscopy, performed on μc‐Si films deposited on various AZO surfaces, are presented as a function of AZO surface roughness σRMS, together with those derived from electron spin resonance. The amplitudes of the PA signals at 1.4 eV increased significantly when σRMS = 22 nm, a roughness where cracks were not observed in the μc‐Si. The amplitudes of the PA signals at 0.9 eV and the spin densities showed sigmoidal increases centered at a critical roughness of around 30 nm. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)