A variety of resist systems have been studied that owe their sensitivity to the occurrence of catalyzed electrophilic rearrangements or substitution processes. In most designs, polyfunctional or polymer‐bound benzylic ethers, esters, or alcohols are used in the key step of the reaction, which is initiated by protonation of the latent electrophilic moiety, resulting in formation of a carbocationic center. Thermal activation of the electrophilic process leads to the formation of new C–C bonds with libe…
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